公开(公告)号：US5455894A

公开(公告)日：1995-10-03

申请号：US50575

申请日：1993-04-19

申请人： Michael R. Conboy ,  Greg A. Smesny ,  Kurt W. Nichter ,  John G. Zvonar

发明人： Michael R. Conboy ,  Greg A. Smesny ,  Kurt W. Nichter ,  John G. Zvonar

IPC分类号： B25J9/16 ,  H01L21/00 ,  H01L21/677 ,  G06F15/00 ,  B23P19/00 ,  H05K3/30

CPC分类号： H01L21/67276 ,  B25J9/1679 ,  H01L21/67769 ,  G05B2219/34291 ,  G05B2219/37558 ,  G05B2219/45026 ,  G05B2219/45063 ,  Y10S414/137 ,  Y10S706/912

摘要： An improved wafer transfer and monitoring system is described which utilizes a robotic interface unit. The robotic interface unit includes at least one wafer storage location placed proximate to a wafer stepper unit. A robotic arm attached to the interface unit is moveable in three dimensions to move wafers between the wafer storage location and the wafer stepper unit. The robotic interface unit can be placed between a wafer stepper unit and a coater/developer unit to transfer wafers between each unit and to store and monitor wafers placed upon the units and/or upon the wafer storage location. Accordingly, the robotic interface unit can operate in a stand-alone configuration with the wafer stepper or can be integrated between a wafer stepper and a wafer coater/developer. By using a robotic arm, less contaminates are associated with the exposed and readily cleaned arm. As such, the robotic interface unit and integrated system can be used in class I wafer fabrication areas where cleanliness is important, and the ability to track and monitor wafers is also important.

摘要翻译： 描述了利用机器人接口单元的改进的晶片转移和监测系统。 机器人接口单元包括靠近晶片步进单元放置的至少一个晶片存储位置。 附接到接口单元的机械臂可以在三维上移动以在晶片存储位置和晶片步进单元之间移动晶片。 机器人接口单元可以放置在晶片步进单元和涂布机/显影单元之间，以在每个单元之间传送晶片，并且存储和监视放置在单元上和/或晶片存储位置的晶片。 因此，机器人接口单元可以与晶片步进器一起工作在独立结构中，或者可以集成在晶片步进器和晶片涂布机/显影剂之间。 通过使用机器人手臂，较少的污染物与暴露且容易清洁的手臂相关联。 因此，机器人接口单元和集成系统可用于清洁度重要的I类晶圆制造领域，并且跟踪和监视晶片的能力也很重要。