公开(公告)号：US06697163B2

公开(公告)日：2004-02-24

申请号：US09761638

申请日：2001-01-18

申请人： Masahiro Fukuda ,  Hitoshi Kamezawa ,  Kyouichi Hirouchi

发明人： Masahiro Fukuda ,  Hitoshi Kamezawa ,  Kyouichi Hirouchi

IPC分类号： G01B1124

CPC分类号： G01B11/245

摘要： A shape measuring apparatus for measuring an outer surface of a measurement object, includes: a photo-sensor unit including two photo-sensors each provided with a number of pixels, first and second signal processing sections which executes combination processing to light reception signals outputted from the photo-sensors. The first signal processing section includes a corrector for correcting errors of light reception signals from one photo-sensor with respect to light reception signals from another photo-sensor in the incident direction or the direction perpendicular to the incident direction based on the relative displacement stored in the displacement memory. The second signal processing section includes a corrector for correcting the relative displacement by delaying the sending of the reception signals from one photo-sensor with respect to the sending of the reception signals from another photo-sensor. The first and second signal processing sections are selectively changed over.

摘要翻译： 一种用于测量被测物体的外表面的形状测量装置，包括：光电传感器单元，包括两个光电传感器，每个光电传感器均设有多个像素;第一和第二信号处理部分，对从 光电传感器。 第一信号处理部分包括校正器，用于相对于来自另一光传感器的入射方向的光接收信号或垂直于入射方向的方向校正来自一个光电传感器的光接收信号的误差，基于存储在入射方向上的相对位移 位移记忆。 第二信号处理部分包括一个校正器，用于相对于来自另一个光电传感器的接收信号的发送延迟来自一个光电传感器的接收信号的发送来校正相对位移。 选择性地切换第一和第二信号处理部分。