公开(公告)号：US20070247180A1

公开(公告)日：2007-10-25

申请号：US11820519

申请日：2007-06-20

申请人： Ron Peters ,  Leonad Hayden ,  Jeffrey Hawkins ,  R. Dougherty

发明人： Ron Peters ,  Leonad Hayden ,  Jeffrey Hawkins ,  R. Dougherty

IPC分类号： G01R31/02

CPC分类号： G01R1/18 ,  G01R1/04 ,  G01R31/002 ,  G01R31/2808 ,  G01R31/286 ,  G01R31/2886 ,  G01R31/2889

摘要： A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.