公开(公告)号：US20190242942A1

公开(公告)日：2019-08-08

申请号：US16390779

申请日：2019-04-22

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Ming-Cheng Hsu ,  Mill-Jer Wang

IPC分类号： G01R31/28

CPC分类号： G01R31/2889

摘要： A probe head and methods of testing a device using a probe head are provided. The probe head includes a first end connected to a first substrate. The first substrate is configured to be connected to a test head. The probe head also includes second end having a first inner recess surrounded by a first protrusion and a first plurality of probe needles connected to the first protrusion.

公开(公告)号：US20180259573A1

公开(公告)日：2018-09-13

申请号：US15455103

申请日：2017-03-09

申请人： Advantest Corporation

发明人： Roland WOLFF

IPC分类号： G01R31/28 ,  G01R1/04

CPC分类号： G01R31/2877 ,  G01R1/0458 ,  G01R31/2863 ,  G01R31/2889

摘要： In one embodiment, a testing apparatus comprises: a modularized logic unit comprising circuitry for testing a plurality of devices under test (DUTs); a DUT interface board for physically and electrically interfacing with said modularized logic unit, said DUT interface board comprising: a loadboard comprising a plurality of sockets for receiving said plurality of DUTs; and a partial enclosure for partially enclosing said plurality of DUTs; a top fan disposed adjacent to a top of said partial enclosure; and a bottom fan disposed adjacent to a bottom of said partial enclosure, wherein the top fan and the bottom fan are operable to generate a vertical ambient air flow from the bottom fan to the top fan to cool said plurality of DUTs with exposed top and bottom sides, wherein the bottom fan is operable to draw ambient air from a surrounding environment.

公开(公告)号：US10018669B2

公开(公告)日：2018-07-10

申请号：US15280148

申请日：2016-09-29

申请人： KABUSHIKI KAISHA NIHON MICRONICS

发明人： Kenichi Shibutani

IPC分类号： G01R31/28 ,  G01R1/067

CPC分类号： G01R31/2889 ,  G01R1/06722

摘要： An electrical contactor of this invention includes: a first plunger to contact one member, the first plunger including a tip portion formed into a plurality of chevron shapes; a second plunger to contact a counterpart member, the second plunger working in cooperation with the first plunger to form electrical conduction between the one member and the counterpart member; and a spring part to couple the tip portion of the first plunger and a tip portion of the second plunger while the tip portion of the first plunger and the tip portion of the second plunger are pointed in opposite directions. The spring part covers an outer periphery of a part where the first plunger and the second plunger are coupled and supports the first plunger and the second plunger in a manner that allows the first plunger and the second plunger to slide relative to each other.

公开(公告)号：US09983228B2

公开(公告)日：2018-05-29

申请号：US14846121

申请日：2015-09-04

申请人： Keithley Instruments, LLC

发明人： Wayne C. Goeke ,  Gregory Sobolewski

IPC分类号： G01R1/067 ,  G01R31/00 ,  G01R1/04 ,  G01R31/28 ,  G01R27/28 ,  G01R31/24 ,  G01R31/06 ,  G01R31/18 ,  G01R31/26

CPC分类号： G01R1/0416 ,  G01R27/28 ,  G01R31/06 ,  G01R31/18 ,  G01R31/24 ,  G01R31/2607 ,  G01R31/2822 ,  G01R31/2889

摘要： Embodiments of the present invention provide an improved two-cable connection system for connecting electrical test instrumentation to a device under test (DUT). In one embodiment, a single pair of equal-length triaxial cables each has a desired characteristic impedance. Each cable has a center connecter, intermediate conductor, and outer conductor. The proximal end of each cable is connected to the test instrumentation, and the distal ends are located at the DUT. At the distal end, the center conductors are connected to the DUT, the intermediate conductors are allowed to float, and the outer conductors are connected to each other. The proximal end of each cable is connected to the device using an appropriate connection for the test that will be performed. This allows the test instrumentation to perform different types of tests without changing connections to the DUT.

公开(公告)号：US09947457B2

公开(公告)日：2018-04-17

申请号：US15443653

申请日：2017-02-27

申请人： SEMCNS CO., LTD.

发明人： Yoon Hyuck Choi ,  Kwang Jae Oh ,  Ki Young Kim

IPC分类号： H01F27/28 ,  G01R1/073 ,  G01R31/28 ,  H01F27/29

CPC分类号： H01F27/2804 ,  G01R1/07378 ,  G01R31/26 ,  G01R31/2889 ,  H01F27/29 ,  H01F27/292

摘要： Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.

公开(公告)号：US09927487B2

公开(公告)日：2018-03-27

申请号：US14133603

申请日：2013-12-18

申请人： MPI Corporation

发明人： Chao-Ching Huang ,  Chih-Hao Ho ,  Wei-Cheng Ku

IPC分类号： G01R31/28 ,  G01R1/073

CPC分类号： G01R31/2887 ,  G01R1/07314 ,  G01R31/2889

摘要： A probe card having a configurable structure for exchanging/swapping electronic components for impedance matching is provided. In the probe card, an applied force is exerted on the electronic component so as to make the electronic component electrically connected with at least one conductive contact pad of a supporting unit. The supporting unit is a circuit board or a space transformer. In order to facilitate the exchange or swap of the electronic component, the applied force can be removed. The probe card includes a pressing plate which can be moved between a pressing position and a non-pressing position. The pressing plate has a pressing surface which is contacted with the top end of the electronic component while the pressing plate is in the pressing position. Therefore, the applied force can be generated or removed by changing the positioning of the pressing plate.

公开(公告)号：US20180045781A1

公开(公告)日：2018-02-15

申请号：US15795085

申请日：2017-10-26

申请人： INNOTIO INC.

发明人： Jaehoon SONG

IPC分类号： G01R31/3185

CPC分类号： G01R31/2891 ,  G01R31/2815 ,  G01R31/2889 ,  G01R31/318502 ,  G01R31/318525 ,  G01R31/318536 ,  G01R31/318544 ,  G01R31/318555 ,  G01R31/318566 ,  G01R31/318594

摘要： An apparatus for performing scan test of IC chip includes a shift-frequency searching unit that searches usable shift frequency for a target scan section among at least one scan section each including whole or part of at least one scan pattern inputted to a scan path. When searching usable shift frequency for the target scan section, the shift-frequency searching unit scales shift frequency of the target scan section differently from that of at least one scan section among scan sections shifted before or after the target scan section or sets shift frequency of the target scan section differently from that of the at least one scan section among the scan sections shifted before or after the target scan section, and searches shift frequency with which result of the scan test indicates pass or shift frequency with which result of the scan test indicates fail.

公开(公告)号：US20180045756A1

公开(公告)日：2018-02-15

申请号：US15794967

申请日：2017-10-26

申请人： RENESAS ELECTRONICS CORPORATION

发明人： Takashi SAITO

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  G01R27/08 ,  H01L29/93 ,  H01L29/66

CPC分类号： G01R1/0675 ,  G01R1/07342 ,  G01R27/08 ,  G01R31/2889 ,  H01L29/66174 ,  H01L29/93

摘要： Reliability of an electrical test of a semiconductor wafer is improved. A method of manufacturing a semiconductor device includes a step of performing an electrical test of a semiconductor element by allowing contact portions (tips) of a force terminal (contact terminal) and a sense terminal (contact terminal) held by a probe card (first card) to come into contact with an electrode terminal of a semiconductor wafer. In the step of performing the electrical test, the contact portions of the force terminal and the sense terminal move in a direction away from each other after coming into contact with the first electrode terminal.

公开(公告)号：US09885737B2

公开(公告)日：2018-02-06

申请号：US14996045

申请日：2016-01-14

申请人： Modus Test Automation, LLC

发明人： Lynwood Adams ,  Jack Lewis

IPC分类号： G01R31/00 ,  G01R1/073 ,  G01R31/28 ,  G01R1/04

CPC分类号： G01R1/07328 ,  G01R1/0466 ,  G01R1/07314 ,  G01R31/2879 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2896

摘要： A testing system for semiconductor chips having a removable device under test printed circuit board (DUT PCB) that electrically connects with the electrical testing components of the system. A removable top plate is placed on top of the DUT PCB and is locked in place by a plurality of locking posts that selectively connect to cam surfaces in the top plate that pull the top plate down sandwiching the DUT PCB between the top plate and the electrical testing components of the system. The DUT PCB is quickly and easily removed and replaced by moving the locking posts between an engaged position and a disengaged position. In this way, a single testing system can be used to test a great variety of semiconductor chips thereby reducing capital equipment costs and space needed in cleanrooms.

公开(公告)号：US20180024167A1

公开(公告)日：2018-01-25

申请号：US15718561

申请日：2017-09-28

申请人： TECHNOPROBE S.p.A.

发明人： Flavio Maggioni

IPC分类号： G01R1/073

CPC分类号： G01R1/07378 ,  G01R1/06766 ,  G01R1/07342 ,  G01R31/2889 ,  H05K1/0231

摘要： A probe card for a testing apparatus of electronic devices comprises at least one testing head housing a plurality of contact probes, each contact probe having at least one contact tip abutting onto contact pads of a device under test, as well as at least one space transformer realizing a spatial transformation of the distances between contact pads made on its opposite sides and connected by means of suitable conductive tracks or planes, as well as a plurality of filtering capacitors provided between the space transformer and a PCB, which comprises direct conductive tracks or planes contacting conductive portions of the filtering capacitors.