公开(公告)号：US20080047488A1

公开(公告)日：2008-02-28

申请号：US11843779

申请日：2007-08-23

申请人： Lawrence Minor ,  Lisa Titolo ,  Hung Nguyen ,  Steve Susie

发明人： Lawrence Minor ,  Lisa Titolo ,  Hung Nguyen ,  Steve Susie

IPC分类号： B05C11/00 ,  B05C11/02

CPC分类号： B05C11/02 ,  B05D1/005 ,  B29D11/00884 ,  G02B1/10 ,  H01L21/6715 ,  H01L21/67253

摘要： A recirculation spin coater system includes a spin coating bowl with a having a recirculation drain and a wetting fluid chamber associated with the upper end of the inner side walls wherein the wetting fluid chamber is configured to dispense a side wall wetting fluid to inner side walls of the spin coating bowl. A vision system configured to capture images of the work piece within the spin coating bowl for quality control and work piece positioning. An annular array of light sources are surrounding sides of the spin coating bowl and are configured to illuminate the interior of the spin coating bowl for optical controls. The vision system may be utilized for both quality control and work piece positioning. The coating nozzle is configured to move between a first coating position vertically aligned with the work piece, and a second purge position vertically aligned with the recirculation drain.

摘要翻译： 再循环旋涂机系统包括具有再循环排水口和与内侧壁的上端相关联的润湿流体室的旋涂筒，其中润湿流体室配置成将侧壁润湿流体分配到内侧壁的内侧壁 旋涂碗。 一种视觉系统，被配置为捕获旋涂槽内的工件的图像，以进行质量控制和工件定位。 环形阵列的光源是旋转涂层碗的周围侧面，并且被配置为照射旋涂碗的内部用于光学控制。 视觉系统可用于质量控制和工件定位。 涂覆喷嘴构造成在与工件垂直对准的第一涂覆位置和与再循环排水管垂直对准的第二吹扫位置之间移动。