公开(公告)号：US5252062A

公开(公告)日：1993-10-12

申请号：US961290

申请日：1992-10-15

申请人： Robert F. Groves ,  Lynda L. Eaton ,  David L. Gardell ,  Paul H. Boileau

发明人： Robert F. Groves ,  Lynda L. Eaton ,  David L. Gardell ,  Paul H. Boileau

IPC分类号： F27D17/00 ,  F27B5/05 ,  F27B11/00 ,  F27D99/00 ,  H01L21/22 ,  F27B5/04

CPC分类号： F27D99/0073 ,  F27B11/00

摘要： The subject invention encompasses a thermal processing furnace having an elongated cylindrical processing chamber surrounding a tower assembly capable of receiving one or more articles to be processed. A pedestal assembly supports the tower assembly and contains a quartz door thereon which is axially translatable relative to the processing chamber into an inserted position where the tower assembly is inserted into the processing chamber. A quartz flange located along the perimeter of an opening at the end of the processing chamber contacts the quartz door forming a quartz seal therewith when the pedestal assembly is moved into the inserted position. A scavenger cavity is located at the end of the chamber having the opening therein and is in fluid flow relationship with the contact area between the quartz flange and the quartz door forming a quartz seal. Gas from within the processing chamber which may leak through the quartz seal is captured by the scavenger cavity and evacuated by an evacuation means.

摘要翻译： 本发明包括一种热处理炉，其具有围绕能够接收一个或多个待处理物品的塔架组件的细长圆柱形处理室。 基座组件支撑塔架组件并且在其上包含石英门，其上相对于处理室可轴向平移到塔架组件插入处理室中的插入位置。 在基座组件移动到插入位置时，位于处理室端部处的开口周边的石英凸缘与石英门接触，形成石英密封。 清除腔位于其中具有开口的室的端部处，并且与石英凸缘和石英门之间的接触面积形成流体流动关系，形成石英密封。 来自处理室内的可能通过石英密封泄漏的气体被清除腔捕获并被抽空装置排空。