公开(公告)号：US06465780B1

公开(公告)日：2002-10-15

申请号：US09540679

申请日：2000-03-31

申请人： Andre Anders ,  Robert A. MacGill ,  Marcela M. M. Bilek ,  Ian G. Brown

发明人： Andre Anders ,  Robert A. MacGill ,  Marcela M. M. Bilek ,  Ian G. Brown

IPC分类号： B01D5944

CPC分类号： H01J37/32055 ,  G21K1/093 ,  H01J37/32623 ,  H01J37/3266 ,  H01J2237/022

摘要： Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.

摘要翻译： 阴极电弧等离子体被大颗粒污染。 已经使用各种磁性等离子体过滤器，其具有各种成功从血浆中除去大颗粒。 开放架构的弯曲电磁过滤器，在过滤器入口和出口处具有额外的励磁线圈，可改善大颗粒过滤。 特别地，扭曲成平面的双弯曲过滤器形成非常紧凑和有效的过滤器。 线圈匝还具有平坦的横截面以促进大颗粒反射出过滤器体积。 可以使用由膨胀器线圈，矫直线圈和均质器形成的输出调节系统与磁性过滤器一起扩展经过滤的等离子体束以覆盖目标的较大面积。 使用该过滤器的阴极电弧等离子体沉积系统可用于沉积用于磁存储工业的超薄无定形硬碳（a-C）膜。