摘要:
Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.
摘要:
A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.
摘要:
Surface modification of magnetic recording heads using plasma immersion ion implantation and deposition is disclosed. This method may be carried out using a vacuum arc deposition system with a metallic or carbon cathode. By operating a plasma gun in a long-pulse mode and biasing the substrate holder with short pulses of a high negative voltage, direct ion implantation, recoil implantation, and surface deposition are combined to modify the near-surface regions of the head or substrate in processing times which may be less than 5 min. The modified regions are atomically mixed into the substrate. This surface modification improves the surface smoothness and hardness and enhances the tribological characteristics under conditions of contact-start-stop and continuous sliding. These results are obtained while maintaining original tolerances.
摘要:
An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam.
摘要:
An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.
摘要:
A system and method for measuring ampoule liquid level are presented. A buoy is arranged entirely within and detached from the ampoule. The buoy contains enough matter having a density less than that of the liquid to maintain flotation of the buoy, and has an exterior surface formed from a non-reactive material. The buoy is further designed to not interfere with any inlet or outlet structures of the ampoule. At least one magnet is displaced within the buoy such that the magnet is located near the ampoule's interior wall when the buoy is arranged within the ampoule. At least one sensor strip is located along the height of and entirely outside of the ampoule's interior wall, and at least one electronic sensor, containing at least one magnetically actuated switch, is located within each sensor strip. The electronic sensor may also contain a visible indicator and/or a resistor. The electronic sensor may be electronically connected to at least one separate system. In a method of using the system to measure the ampoule's liquid level, the buoy is arranged within the ampoule and the sensor strip is arranged outside the ampoule. As the magnet in the buoy passes near a magnetically actuated switch outside the ampoule, the switch closes to either illuminate a visual indicator or signal a separate system.
摘要:
Surface modification of magnetic recording heads using plasma immersion ion implantation and deposition is disclosed. This method may be carried out using a vacuum arc deposition system with a metallic or carbon cathode. By operating a plasma gun in a long-pulse mode and biasing the substrate holder with short pulses of a high negative voltage, direct ion implantation, recoil implantation, and surface deposition are combined to modify the near-surface regions of the head or substrate in processing times which may be less than 5 min. The modified regions are atomically mixed into the substrate. This surface modification improves the surface smoothness and hardness and enhances the tribological characteristics under conditions of contact-start-stop and continuous sliding. These results are obtained while maintaining original tolerances.
摘要:
A copier is described which is capable of simplex and duplex copying which includes a photoreceptor (11), first and second copy sheet trays (41 and 42) and a duplex buffer tray (43). A first sheet feeder (46) is associated with the first copy sheet tray (41) and a second sheet feeder (45) is commonly associated with the duplex buffer tray (43) and the second copy sheet tray (42). The trays (42, 43) are relatively movable for operatively associating them only one at a time with the second feeder (45). A control is provided for selecting sheet feeding from one of the copy sheet trays (41, 42) and further for controlling the trays such that during duplex copying copy sheets are fed only from the first copy sheet tray (41) and only the buffer tray (43) is operatively associated with the common sheet feeder (45).
摘要:
A duplex copying machine is provided with an open operator-accessible buffer storage tray and appropriate sheet feeding means to feed paper through the machine. In duplexing mode, sheet feeding takes place from the buffer storage tray instead of the main paper supply store.
摘要:
A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.