公开(公告)号：US20240219460A1

公开(公告)日：2024-07-04

申请号：US18090415

申请日：2022-12-28

申请人： Xianghong TONG ,  Jennifer HUENING ,  Joshua KEVEK ,  Kimberlee CELIO ,  Tristan DEBORDE ,  Prasoon JOSHI ,  May Ling OH ,  Hyuk Ju RYU ,  Mitchell SENGER ,  Martin VON HAARTMAN ,  Yunfei WANG ,  Shuai ZHAO

发明人： Xianghong TONG ,  Jennifer HUENING ,  Joshua KEVEK ,  Kimberlee CELIO ,  Tristan DEBORDE ,  Prasoon JOSHI ,  May Ling OH ,  Hyuk Ju RYU ,  Mitchell SENGER ,  Martin VON HAARTMAN ,  Yunfei WANG ,  Shuai ZHAO

IPC分类号： G01R31/307 ,  G01R31/311

CPC分类号： G01R31/307 ,  G01R31/311

摘要： This disclosure describes systems, methods, and devices related to electron beam and nanoprobing techniques with probe tips for fault isolation in integrated circuits. A method may include generating a signal at a circuit device under test while a probe tip electrically interacts with a transistor of the circuit device under test; detecting, based on the signal and the laser at the transistor, an electrical output of the circuit device under test; and identifying, based on the electrical output, a location of a fault at the circuit device under test.