公开(公告)号：US07142992B1

公开(公告)日：2006-11-28

申请号：US10954968

申请日：2004-09-30

申请人： Patrick Huet ,  Maruti Shanbhag ,  Sandeep Bhagwat ,  Michal Kowalski ,  Vivekanand Kini ,  David Randall ,  Sharon McCauley ,  Tong Huang ,  Jianxin Zhang ,  Kenong Wu ,  Lisheng Gao ,  Ariel Tribble ,  Ashok Kulkarni ,  Cecelia Anne Campochiaro

发明人： Patrick Huet ,  Maruti Shanbhag ,  Sandeep Bhagwat ,  Michal Kowalski ,  Vivekanand Kini ,  David Randall ,  Sharon McCauley ,  Tong Huang ,  Jianxin Zhang ,  Kenong Wu ,  Lisheng Gao ,  Ariel Tribble ,  Ashok Kulkarni ,  Cecelia Anne Campochiaro

IPC分类号： G01R31/00 ,  G06F19/00

CPC分类号： G06T7/0004 ,  G01R31/2846 ,  G06T2200/24 ,  G06T2207/30148

摘要： Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

摘要翻译： 提供了用于分类半导体制造中的缺陷的混合方法。 这些方法包括将错误的规则序列应用于检查数据。 规则序列包括确定性规则，统计规则，混合规则或其某种组合。 序列中包括的规则可以由用户使用图形界面来选择。 该方法还包括基于将规则序列应用于检查数据的结果对缺陷进行分类。

公开(公告)号：US20060265145A1

公开(公告)日：2006-11-23

申请号：US10954968

申请日：2004-09-30

申请人： Patrick Huet ,  Maruti Shanbhag ,  Sandeep Bhagwat ,  Michal Kowalski ,  Vivekanand Kini ,  David Randall ,  Sharon McCauley ,  Tong Huang ,  Jianxin Zhang ,  Kenong Wu ,  Lisheng Gao ,  Ariel Tribble ,  Ashok Kulkarni ,  Cecelia Anne Campochiaro

发明人： Patrick Huet ,  Maruti Shanbhag ,  Sandeep Bhagwat ,  Michal Kowalski ,  Vivekanand Kini ,  David Randall ,  Sharon McCauley ,  Tong Huang ,  Jianxin Zhang ,  Kenong Wu ,  Lisheng Gao ,  Ariel Tribble ,  Ashok Kulkarni ,  Cecelia Anne Campochiaro

IPC分类号： G01B5/28

CPC分类号： G06T7/0004 ,  G01R31/2846 ,  G06T2200/24 ,  G06T2207/30148

摘要： Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

摘要翻译： 提供了用于分类半导体制造中的缺陷的混合方法。 这些方法包括将错误的规则序列应用于检查数据。 规则序列包括确定性规则，统计规则，混合规则或其某种组合。 包括在序列中的规则可以由用户使用图形界面来选择。该方法还包括基于将规则序列应用于检查数据的结果对缺陷进行分类。

公开(公告)号：US06718526B1

公开(公告)日：2004-04-06

申请号：US10360433

申请日：2003-02-07

申请人： Peter Eldredge ,  Patrick Y. Huet ,  Robinson Piramuthu ,  Sandeep Bhagwat ,  Kai Chi ,  Kai Liu ,  Martin Plihal ,  Shaio Roan ,  Maruti Shanbhag

发明人： Peter Eldredge ,  Patrick Y. Huet ,  Robinson Piramuthu ,  Sandeep Bhagwat ,  Kai Chi ,  Kai Liu ,  Martin Plihal ,  Shaio Roan ,  Maruti Shanbhag

IPC分类号： G06F1750

CPC分类号： G06T7/001

摘要： A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

摘要翻译： 一种用于确定衬底上一组物理事件的分配分类的系统。 传感器感测衬底上的物理事件并产生事件数据。 插入规则模块管理器接收并管理任意数量的插入规则模块。 每个插入规则模块都有输入，本地过滤器，分析器和输出。 输入从前面插入规则模块接收事件数据和置信度值。 本地过滤器分析来自先前插入规则模块的接收到的置信度值，并且通过至少部分地基于从先前插入到规则模块中得到的置信度值来选择性地传递插件规则模块。 鉴于与插入规则模块相关联的给定分类，分析器分析事件数据，并且至少部分地基于事件数据符合给定分类的方式来分配置信度值。 输出为后续插入规则模块提供置信度值。 后处理器接收由插入规则模块提供的置信度值，并且至少部分地基于所产生的置信度值的比较，从所述给定分类中选择与所述一组物理事件相关联的所分配的分类 通过所有插入规则模块。