公开(公告)号：US06352083B1

公开(公告)日：2002-03-05

申请号：US09195190

申请日：1998-11-17

申请人： Hiroyuki Araki ,  Kenichiro Arai ,  Masaaki Yabuta

发明人： Hiroyuki Araki ,  Kenichiro Arai ,  Masaaki Yabuta

IPC分类号： B08B300

CPC分类号： H01L21/67057 ,  B08B3/102 ,  H01L21/67051

摘要： A control unit controls a lifter to raise at least part of each of a group of substrates above the liquid level of a treating liquid in a treating bath. Thereafter, a valve is opened to drain the treating liquid from the treating bath at a high speed. As a result, a physical force to tilt and adhere an upper portion of the adjacent substrates accompanied by lowering of the liquid level of the treating liquid due to the high speed drainage acts upon a lower portion of the substrates near the lowered liquid level of the treating liquid, thereby reducing the physical force exerted on the substrates. This arrangement, even if a holding interval between the substrates is narrowed at a half of a normal pitch, eliminates a contact of the adjacent substrates and prevents damage of the substrates due to the contact without providing an additional member such as a substrate support guide in the treating bath.

摘要翻译： 控制单元控制升降器，以将处理液中的处理液的液面以上的一组基板中的每一个的至少一部分升高。 此后，打开阀门以高速排出处理液。 结果，伴随着由于高速排水引起的处理液的液面的降低而倾斜并附着相邻基板的上部的物理力作用在基板的较低部分附近， 从而减少施加在基板上的物理力。 这种布置，即使基板之间的保持间隔在正常间距的一半处变窄，消除了相邻基板的接触，并且防止了由于接触而导致的基板的损坏，而没有提供诸如基板支撑引导件的附加构件 治疗浴。

公开(公告)号：US5096450A

公开(公告)日：1992-03-17

申请号：US679170

申请日：1991-03-26

申请人： Toshikazu Sugimura ,  Yoshio Takeshima ,  Hidefumi Yamamoto ,  Masaaki Yabuta ,  Masami Horiuchi

发明人： Toshikazu Sugimura ,  Yoshio Takeshima ,  Hidefumi Yamamoto ,  Masaaki Yabuta ,  Masami Horiuchi

IPC分类号： H01J9/04

CPC分类号： H01J9/042

摘要： A method for fabricating an impregnated type cathode comprises the steps of mixing metal powder having a high melting point and a heat proof property, and electron emission substance powder in a dry state, pressing the mixed powder to provide a pressed mixture, and applying an isostatic pressure to the pressed mixture contained in a sealed capsule. At the mixing stage, the metal powder is heated by a high temperature lower than the melting point, and at the mixing stage, a sintered mixture is obtained. In this method, the steps are simplified and decreased in number to decrease a fabricating cost. Furthermore, no influence occurs in electron emission due to hydrooxides.