公开(公告)号：US07806586B2

公开(公告)日：2010-10-05

申请号：US11446568

申请日：2006-06-02

申请人： Renata Melamud ,  Bongsang Kim ,  Matt Hopcroft ,  Saurabh Chandorkar ,  Manu Agarwal ,  Thomas W. Kenny

发明人： Renata Melamud ,  Bongsang Kim ,  Matt Hopcroft ,  Saurabh Chandorkar ,  Manu Agarwal ,  Thomas W. Kenny

IPC分类号： G01K11/22

CPC分类号： G01L9/0022 ,  G01L19/04 ,  H03H9/2473

摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

摘要翻译： 诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。 根据本发明的示例性实施例，为机械传感器应用实现材料的组合以减轻温度相关的变化。 在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。 另一种应用是针对硅 - 二氧化硅的材料组合。

公开(公告)号：US20070277620A1

公开(公告)日：2007-12-06

申请号：US11446568

申请日：2006-06-02

申请人： Renata Melamud ,  Bongsang Kim ,  Matt Hopcroft ,  Saurabh Chandorkar ,  Manu Agarwal ,  Thomas W. Kenny

发明人： Renata Melamud ,  Bongsang Kim ,  Matt Hopcroft ,  Saurabh Chandorkar ,  Manu Agarwal ,  Thomas W. Kenny

IPC分类号： G01L1/00

CPC分类号： G01L9/0022 ,  G01L19/04 ,  H03H9/2473

摘要： Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

摘要翻译： 诸如压力传感器，谐振器或其他频率参考装置之类的机械传感器在不同温度的特征的条件下实现。 根据本发明的示例性实施例，为机械传感器应用实现材料的组合以减轻温度相关的变化。 在一个应用中，材料性质失配用于促进单锚传感器应用，例如用于谐振器。 另一种应用是针对硅 - 二氧化硅的材料组合。