公开(公告)号：US06294862B1

公开(公告)日：2001-09-25

申请号：US09081545

申请日：1998-05-19

申请人： Adam A. Brailove ,  Matthew Charles Gwinn

发明人： Adam A. Brailove ,  Matthew Charles Gwinn

IPC分类号： H01J2702

CPC分类号： H01J27/18

摘要： An ion source (26) includes a plasma confinement chamber and a plasma electrode (70) forming a generally planar wall section of the plasma confinement chamber. The plasma electrode (70) has at least one opening (84, 86) for allowing an ion beam (88) to exit the confinement chamber and has a set of magnets (78, 80, 82) that generate a magnetic field extending across the openings (84, 86) in the plasma electrode (70). The openings (84, 86) in the plasma electrode (70) can be fashioned as elongated slots or circular openings aligned along the axis. The ion source (26) can further include a power supply (72) for negatively biasing the plasma electrode relative to the plasma confinement chamber and an insulator (74) for electrically insulating the plasma electrode (70). Cooling tubes can also be provided to transfer heat away from the magnets in the plasma electrode (70).

摘要翻译： 离子源（26）包括等离子体限制室和等离子体电极（70），其形成等离子体约束室的大致平面的壁部分。 等离子体电极（70）具有用于允许离子束（88）离开限制室的至少一个开口（84,86），并具有一组磁体（78,80,82），该磁体产生一个磁场 等离子体电极（70）中的开口（84,86）。 等离子体电极（70）中的开口（84,86）可以被形成为沿轴线对齐的细长槽或圆形开口。 离子源（26）还可以包括用于相对于等离子体限制室负偏置等离子体电极的电源（72）和用于电绝缘等离子体电极（70）的绝缘体（74）。 还可以提供冷却管以将热量从等离子体电极（70）中的磁体传出。