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    Systems and methods for cylindrical hall thrusters with independently controllable ionization and acceleration stages
    3.
    发明授权
    Systems and methods for cylindrical hall thrusters with independently controllable ionization and acceleration stages 有权
    圆柱形霍尔推进器的系统和方法，具有独立可控的电离和加速阶段

    公开(公告)号：US08723422B2

    公开(公告)日：2014-05-13

    申请号：US13035475

    申请日：2011-02-25

    申请人： Kevin David Diamant ,  Yevgeny Raitses ,  Nathaniel Joseph Fisch

    发明人： Kevin David Diamant ,  Yevgeny Raitses ,  Nathaniel Joseph Fisch

    IPC分类号： H05H1/46 ,  H05H1/24

    CPC分类号： H05H1/54 ,  F03H1/0068 ,  H01J27/18

    摘要： Systems and methods may be provided for cylindrical Hall thrusters with independently controllable ionization and acceleration stages. The systems and methods may include a cylindrical channel having a center axial direction, a gas inlet for directing ionizable gas to an ionization section of the cylindrical channel, an ionization device that ionizes at least a portion of the ionizable gas within the ionization section to generate ionized gas, and an acceleration device distinct from the ionization device. The acceleration device may provide an axial electric field for an acceleration section of the cylindrical channel to accelerate the ionized gas through the acceleration section, where the axial electric field has an axial direction in relation to the center axial direction. The ionization section and the acceleration section of the cylindrical channel may be substantially non-overlapping.

    摘要翻译： 可以为具有独立可控电离和加速阶段的圆柱形霍尔推进器提供系统和方法。 该系统和方法可以包括具有中心轴向方向的圆柱形通道，用于将可离子化气体引导到圆柱形通道的电离部分的气体入口，离子化装置，其离子化离子化部分内的至少一部分可电离气体以产生 电离气体和与电离装置不同的加速装置。 加速装置可以为圆柱形通道的加速部分提供轴向电场，以通过加速部加速电离气体，其中轴向电场相对于中心轴向具有轴向方向。 圆柱形通道的电离部分和加速部分可以基本上不重叠。

    SPIN POLARIZED ION BEAM GENERATION APPARATUS AND SCATTERING SPECTROSCOPY APPARATUS USING THE SPIN POLARIZED ION BEAM AND SPECIMEN PROCESSING APPARATUS
    5.
    发明申请
    SPIN POLARIZED ION BEAM GENERATION APPARATUS AND SCATTERING SPECTROSCOPY APPARATUS USING THE SPIN POLARIZED ION BEAM AND SPECIMEN PROCESSING APPARATUS 有权
    使用旋转极化离子束和样品处理装置的旋转极化离子光束生成装置和散射光谱仪

    公开(公告)号：US20100044564A1

    公开(公告)日：2010-02-25

    申请号：US12516351

    申请日：2007-11-29

    申请人： Taku Suziki ,  Yasuhi Yamauchi

    发明人： Taku Suziki ,  Yasuhi Yamauchi

    IPC分类号： H01J27/24 ,  G01N23/225

    CPC分类号： H01J27/24 ,  G01R33/282 ,  H01J27/18 ,  H01J37/08 ,  H01J2237/0815 ,  H01J2237/24557 ,  H01J2237/25

    摘要： A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.

    摘要翻译： 自旋极化离子束产生装置（30）可以通过使用泵送光发生器（33）对高频放电管（15）中的离子来有效地产生自旋极化离子，以通过圆偏振来照射光泵浦（33,34） 与亚稳原子相互正交的光和线偏振光。 例如，可以产生自旋极化率超过18％，高达25％的极化氦离子束。 自旋极化离子束产生装置（30）也可以应用于能够将极化离子束照射到试样的处理装置和分析装置。 根据自旋极化离子散射光谱装置，可以测量从样品表面开始在约2至3个原子层深度的区域中的自旋状态，同时以较小的测量时间来区分元素与原子层，并且与 在常规技术中不可能达到高准确度。

    Ion-beam source
    6.
    发明申请
    Ion-beam source 有权
    离子束源

    公开(公告)号：US20090189083A1

    公开(公告)日：2009-07-30

    申请号：US12011160

    申请日：2008-01-25

    申请人： Valery Godyak

    发明人： Valery Godyak

    IPC分类号： H01J27/00

    CPC分类号： H01J27/18

    摘要： An ion-beam source comprising: a plasma-generation unit for generating plasma and an ion-extraction unit for extraction and acceleration of ions from the aforementioned plasma, where the ion-extraction unit is made in the form of at least one grid under a negative potential. The plasma generating unit consists of a working chamber having a deeply immersed antenna cell. The cell contains a ferromagnetic core, a heat conductor with a heat sink, at least one inductive coil wound onto the ferromagnetic core, and a cap made from a dielectric material that sealingly covers the ferromagnetic core and the inductive coil.

    摘要翻译： 一种离子束源，包括：用于产生等离子体的等离子体产生单元和用于从上述等离子体中提取和加速离子的离子提取单元，其中离子提取单元以至少一个格子的形式制成在 负电位 等离子体发生单元由具有深度浸没的天线电池的工作室组成。 电池包含铁磁芯，具有散热器的热导体，缠绕在铁磁芯上的至少一个感应线圈，以及由密封地覆盖铁磁芯和感应线圈的介电材料制成的盖。

    METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE
    8.
    发明申请
    METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE 有权
    一种离子源的电磁操作方法

    公开(公告)号：US20080179284A1

    公开(公告)日：2008-07-31

    申请号：US12037598

    申请日：2008-02-26

    申请人： Alan V. Hayes ,  Rustam Yevtukhov ,  Viktor Kanarov ,  Boris L. Druz

    发明人： Alan V. Hayes ,  Rustam Yevtukhov ,  Viktor Kanarov ,  Boris L. Druz

    IPC分类号： G01L21/30 ,  B44C1/22

    CPC分类号： H01J37/08 ,  H01J27/18 ,  H01J37/3053 ,  H01J2237/061 ,  H01J2237/083 ,  H01J2237/24542 ,  H01L21/67069

    摘要： Methods of operating an electromagnet of an ion source for generating an ion beam with a controllable ion current density distribution. The methods may include generating plasma in a discharge space of the ion source, generating and shaping a magnetic field in the discharge space by applying a current to an electromagnet that is effective to define a plasma density distribution, extracting an ion beam from the plasma, measuring a distribution profile for the ion beam density, and comparing the actual distribution profile with a desired distribution profile for the ion beam density. Based upon the comparison, the current applied to the electromagnet may be adjusted either manually or automatically to modify the magnetic field in the discharge space and, thereby, alter the plasma density distribution.

    摘要翻译： 操作离子源的电磁体的方法，用于产生具有可控离子电流密度分布的离子束。 所述方法可以包括在离子源的放电空间中产生等离子体，通过向有效限定等离子体密度分布的电磁体施加电流来产生和放电放电空间中的磁场，从等离子体提取离子束， 测量离子束密度的分布曲线，并将实际分布分布与用于离子束密度的期望分布分布进行比较。 基于比较，可以手动或自动地调节施加到电磁体的电流，以改变放电空间中的磁场，从而改变等离子体密度分布。

    Slotted antenna waveguide plasma source
    9.
    发明授权
    Slotted antenna waveguide plasma source 失效
    开槽天线波导等离子体源

    公开(公告)号：US07305935B1

    公开(公告)日：2007-12-11

    申请号：US10925499

    申请日：2004-08-25

    申请人： John Foster

    发明人： John Foster

    IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

    CPC分类号： C23C14/357 ,  H01J27/18 ,  H01J37/077 ,  H01J37/08 ,  H01J37/32422 ,  H01J37/32678 ,  H01J2237/0041 ,  H01J2237/06366 ,  H01J2237/3114 ,  H01J2237/31701 ,  H05H1/46

    摘要： A high density plasma generated by microwave injection using a windowless electrodeless rectangular slotted antenna waveguide plasma source has been demonstrated. Plasma probe measurements indicate that the source could be applicable for low power ion thruster applications, ion implantation, and related applications. This slotted antenna plasma source invention operates on the principle of electron cyclotron resonance (ECR). It employs no window and it is completely electrodeless and therefore its operation lifetime is long, being limited only by either the microwave generator itself or charged particle extraction grids if used. The high density plasma source can also be used to extract an electron beam that can be used as a plasma cathode neutralizer for ion source beam neutralization applications.

    摘要翻译： 已经证明通过使用无窗无电极矩形开槽天线波导等离子体源的微波注入产生的高密度等离子体。 等离子探头测量表明，该源可适用于低功率离子推进器应用，离子注入和相关应用。 这种开槽天线等离子体源发明以电子回旋共振（ECR）为原则。 它没有窗户，它是完全无电极的，因此其使用寿命长，仅受微波发生器本身或带电粒子提取网格的限制（如果使用）。 高密度等离子体源还可用于提取可用作离子源光束中和应用的等离子体阴极中和器的电子束。

    Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge
    10.
    发明授权
    Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge 失效
    两级霍尔效应等离子体加速器，包括由高频放电驱动的等离子体源

    公开(公告)号：US07294969B2

    公开(公告)日：2007-11-13

    申请号：US11141189

    申请日：2005-06-01

    申请人： Hitoshi Kuninaka

    发明人： Hitoshi Kuninaka

    IPC分类号： H01J1/52

    CPC分类号： H05H1/54 ,  F03H1/0075 ,  H01J27/18

    摘要： Disclosed is a high-frequency discharge plasma generation-based two-stage Hall-effect plasma accelerator, which comprises an annular acceleration channel having a gas inlet port, a high-frequency wave supply section, an anode, a cathode, a neutralizing electron generation portion and a magnetic-field generation element, wherein: gas introduced from the gas inlet port into the annular acceleration channel is ionized by a high-frequency wave supplied from the high-frequency wave supply section, to generate plasma; a positive ion includes in the generated plasma is accelerated by an acceleration voltage applied between the anode and cathode, and ejected outside; and an electron included in the generated plasma is restricted in its movement in the axial direction of the annular acceleration channel by an interaction with a magnetic field. The two-stage Hall-effect plasma accelerator is designed to control a degree of ion acceleration in accordance with the acceleration voltage serving as an acceleration control parameter, and control an amount of plasma generation in accordance with the high-frequency wave output serving as a plasma-generation control parameter. The two-stage Hall-effect plasma accelerator of the present invention can control the ion acceleration and the plasma generation in a highly independent manner.

    摘要翻译： 公开了一种基于高频放电等离子体生成的两级霍尔效应等离子体加速器，其包括具有气体入口，高频波供应部，阳极，阴极，中和电子发生部 部分和磁场产生元件，其中：从气体入口引入环形加速通道的气体通过从高频波供应部分提供的高频波电离，以产生等离子体; 所产生的等离子体中的正离子被施加在阳极和阴极之间的加速电压加速并被外部喷出; 包含在所产生的等离子体中的电子通过与磁场的相互作用而限制其在环形加速通道的轴向方向上的移动。 两级霍尔效应等离子体加速器被设计成根据用作加速度控制参数的加速电压来控制离子加速度，并且根据作为加速度控制参数的高频波输出来控制等离子体产生量 等离子体发生控制参数。 本发明的两级霍尔效应等离子体加速器可以以非常独立的方式控制离子加速度和等离子体产生。