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公开(公告)号:US20100142796A1
公开(公告)日:2010-06-10
申请号:US12315699
申请日:2008-12-05
申请人: Jen-Ming Chang , Mau-Hsiung Hsu , Yen-Hsin Tseng , Guo-Cheng Ho , Hsuan Yang , Chih-Chieh Yu , Jia-Lin Shen , Jui-Yu Lin
发明人: Jen-Ming Chang , Mau-Hsiung Hsu , Yen-Hsin Tseng , Guo-Cheng Ho , Hsuan Yang , Chih-Chieh Yu , Jia-Lin Shen , Jui-Yu Lin
IPC分类号: G06K9/00
CPC分类号: G01N21/9501 , G01N21/9505
摘要: An inspection method and apparatus for a substrate are provided. The inspection apparatus includes an optical unit generating a light illuminating the substrate to generate an image, a sensor array receiving the image having a light wave comprising a wave-band within a range between 700 nm to 1500 nm, and an image processing unit capturing the image.
摘要翻译: 提供了一种用于基板的检查方法和装置。 所述检查装置包括产生照射所述基板以产生图像的光的光学单元,接收具有包括在700nm至1500nm范围内的波段的光波的图像的传感器阵列和捕获所述图像处理单元的图像处理单元 图片。