公开(公告)号：US08563214B2

公开(公告)日：2013-10-22

申请号：US13502211

申请日：2010-10-14

申请人： Katsuhiro Kikuchi ,  Kentaro Usui ,  Masakazu Shibasaki ,  Takashi Ochi ,  Tatsuro Kato ,  Kenichi Hamada ,  Masashi Arai ,  Megumi Murata ,  Hideaki Takase

发明人： Katsuhiro Kikuchi ,  Kentaro Usui ,  Masakazu Shibasaki ,  Takashi Ochi ,  Tatsuro Kato ,  Kenichi Hamada ,  Masashi Arai ,  Megumi Murata ,  Hideaki Takase

IPC分类号： G03F7/023

CPC分类号： G03F7/0233 ,  G03F7/0226 ,  G03F7/40

摘要： The present invention relates to a radiation sensitive resin composition comprising [A] an alkali-soluble resin, [B] a 1,2-quinonediazide compound and [C] a radical trapping agent.The radiation sensitive resin composition can provide an interlayer insulating film which satisfies general requirements for an interlayer insulating film such as high light transmittance and has excellent heat-resistant dimensional stability, heat discoloration resistance and adhesion to a substrate along with the improvement of process efficiency for improving product yield at a high resolution and has excellent storage stability.

摘要翻译： 本发明涉及一种辐射敏感性树脂组合物，其包含[A]碱溶性树脂，[B] 1,2-醌二叠氮化合物和[C]基团捕获剂。 辐射敏感性树脂组合物可以提供层间绝缘膜，其满足诸如高透光率的层间绝缘膜的一般要求，并且具有优异的耐热尺寸稳定性，耐热变色性和对基材的粘附性，同时提高了工艺效率 以高分辨率提高产品收率，并具有优良的储存稳定性。

公开(公告)号：US20120270151A1

公开(公告)日：2012-10-25

申请号：US13502211

申请日：2010-10-14

申请人： Katsuhiro Kikuchi ,  Kentaro Usui ,  Masakazu Shibasaki ,  Takashi Ochi ,  Tatsuro Kato ,  Kenichi Hamada ,  Masashi Arai ,  Megumi Murata ,  Hideaki Takase

发明人： Katsuhiro Kikuchi ,  Kentaro Usui ,  Masakazu Shibasaki ,  Takashi Ochi ,  Tatsuro Kato ,  Kenichi Hamada ,  Masashi Arai ,  Megumi Murata ,  Hideaki Takase

IPC分类号： G03F7/004 ,  G03F7/20

CPC分类号： G03F7/0233 ,  G03F7/0226 ,  G03F7/40

摘要： The present invention relates to a radiation sensitive resin composition comprising [A] an alkali-soluble resin, [B] a 1,2-quinonediazide compound and [C] a radical trapping agent.The radiation sensitive resin composition can provide an interlayer insulating film which satisfies general requirements for an interlayer insulating film such as high light transmittance and has excellent heat-resistant dimensional stability, heat discoloration resistance and adhesion to a substrate along with the improvement of process efficiency for improving product yield at a high resolution and has excellent storage stability.

摘要翻译： 本发明涉及一种辐射敏感性树脂组合物，其包含[A]碱溶性树脂，[B] 1,2-醌二叠氮化合物和[C]基团捕获剂。 辐射敏感性树脂组合物可以提供层间绝缘膜，其满足诸如高透光率的层间绝缘膜的一般要求，并且具有优异的耐热尺寸稳定性，耐热变色性和对基材的粘附性，同时提高了工艺效率 以高分辨率提高产品收率，并具有优良的储存稳定性。