公开(公告)号：US08484760B2

公开(公告)日：2013-07-09

申请号：US12952346

申请日：2010-11-23

申请人： Michael Despont ,  Venkataraman Kartik ,  Charalampos Pozidis ,  Deepak Ranjan Sahoo

发明人： Michael Despont ,  Venkataraman Kartik ,  Charalampos Pozidis ,  Deepak Ranjan Sahoo

IPC分类号： G03F7/02

CPC分类号： H01H35/144 ,  G01Q10/04 ,  G01Q10/045

摘要： A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.

摘要翻译： 一种包括第一部分和第二部分的装置，其中一个是悬臂，第一和第二部分彼此连接并且可相对于彼此移动。 该装置包括布置在第一部分上并被配置成提供磁场的磁性元件。 该装置还包括布置在第二部分上并被配置为提供与磁性元件的磁场相互作用的致动磁场，从而引起或抑制第一和第二部分的相对运动的磁化装置。 还描述了包括这种装置的扫描系统。