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公开(公告)号：US08395877B2
公开(公告)日：2013-03-12
申请号：US12370356
申请日：2009-02-12
CPC分类号： G09G3/3433 , G09G2320/0252 , G11C23/00
摘要： A micro-electro mechanical device includes a first structure, a second structure offset from the first structure by a gap. The first structure is configured to be electrostatically actuated to deflect relative to second structure. A pulse generator is configured to combine at least two different pulses to electrostatically drive at least one of the first structure and the second structure between an initial position and a final position.
摘要翻译： 微机电装置包括第一结构，通过间隙从第一结构偏移的第二结构。 第一结构构造成静电致动以相对于第二结构偏转。 脉冲发生器被配置为组合至少两个不同的脉冲以在初始位置和最终位置之间静电驱动第一结构和第二结构中的至少一个。
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公开(公告)号：US08484760B2
公开(公告)日：2013-07-09
申请号：US12952346
申请日：2010-11-23
IPC分类号： G03F7/02
CPC分类号： H01H35/144 , G01Q10/04 , G01Q10/045
摘要： A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
摘要翻译： 一种包括第一部分和第二部分的装置，其中一个是悬臂，第一和第二部分彼此连接并且可相对于彼此移动。 该装置包括布置在第一部分上并被配置成提供磁场的磁性元件。 该装置还包括布置在第二部分上并被配置为提供与磁性元件的磁场相互作用的致动磁场，从而引起或抑制第一和第二部分的相对运动的磁化装置。 还描述了包括这种装置的扫描系统。
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公开(公告)号：US08026715B2
公开(公告)日：2011-09-27
申请号：US12245243
申请日：2008-10-03
CPC分类号： G01R33/093 , B82Y25/00 , B82Y35/00 , G01D5/145
摘要： A position sensor and method include a magnetic component, a first magneto-resistive sensor disposed in proximity to the magnet/coil; and a second magneto-resistive sensor disposed in proximity to the magnetic component and the first magneto-resistive sensor. The first magneto-resistive sensor and second magneto-resistive sensor are configured to sense changes in a stray magnetic field created by the magnetic component in accordance with a relative positional change between the magnetic component and the first and second magneto-resistive sensors.
摘要翻译： 位置传感器和方法包括磁性部件，设置在磁体/线圈附近的第一磁阻传感器; 以及设置在所述磁性部件和所述第一磁阻传感器附近的第二磁阻传感器。 第一磁阻传感器和第二磁阻传感器被配置为根据磁性部件和第一和第二磁阻传感器之间的相对位置变化来感测由磁性部件产生的杂散磁场的变化。
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公开(公告)号：US20110126329A1
公开(公告)日：2011-05-26
申请号：US12952346
申请日：2010-11-23
IPC分类号： G01Q70/00
CPC分类号： H01H35/144 , G01Q10/04 , G01Q10/045
摘要： A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
摘要翻译： 一种包括第一部分和第二部分的装置，其中一个是悬臂，第一和第二部分彼此连接并且可相对于彼此移动。 该装置包括布置在第一部分上并被配置成提供磁场的磁性元件。 该装置还包括布置在第二部分上并被配置为提供与磁性元件的磁场相互作用的致动磁场，从而引起或抑制第一和第二部分的相对运动的磁化装置。 还描述了包括这种装置的扫描系统。
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公开(公告)号：US20100085041A1
公开(公告)日：2010-04-08
申请号：US12245243
申请日：2008-10-03
CPC分类号： G01R33/093 , B82Y25/00 , B82Y35/00 , G01D5/145
摘要： A position sensor and method include a magnetic component, a first magneto-resistive sensor disposed in proximity to the magnet/coil; and a second magneto-resistive sensor disposed in proximity to the magnetic component and the first magneto-resistive sensor. The first magneto-resistive sensor and second magneto-resistive sensor are configured to sense changes in a stray magnetic field created by the magnetic component in accordance with a relative positional change between the magnetic component and the first and second magneto-resistive sensors.
摘要翻译： 位置传感器和方法包括磁性部件，设置在磁体/线圈附近的第一磁阻传感器; 以及设置在所述磁性部件和所述第一磁阻传感器附近的第二磁阻传感器。 第一磁阻传感器和第二磁阻传感器被配置为根据磁性部件和第一和第二磁阻传感器之间的相对位置变化来感测由磁性部件产生的杂散磁场的变化。
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公开(公告)号：US20100201289A1
公开(公告)日：2010-08-12
申请号：US12370356
申请日：2009-02-12
CPC分类号： G09G3/3433 , G09G2320/0252 , G11C23/00
摘要： A micro-electro mechanical device includes a first structure, a second structure offset from the first structure by a gap. The first structure is configured to be electrostatically actuated to deflect relative to second structure. A pulse generator is configured to combine at least two different pulses to electrostatically drive at least one of the first structure and the second structure between an initial position and a final position.
摘要翻译： 微机电装置包括第一结构，通过间隙从第一结构偏移的第二结构。 第一结构构造成静电致动以相对于第二结构偏转。 脉冲发生器被配置为组合至少两个不同的脉冲以在初始位置和最终位置之间静电驱动第一结构和第二结构中的至少一个。
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7.发明申请DYNAMIC MODE NANO-SCALE IMAGING AND POSITION CONTROL USING DEFLECTION SIGNAL DIRECT SAMPLING OF HIGHER MODE-ACTUATED MICROCANTILEVERS 有权动态模式NANO-SCALE成像和位置控制采用偏转信号直接采样高效模式微处理器公开(公告)号：US20110321202A1
公开(公告)日：2011-12-29
申请号：US12824337
申请日：2010-06-28
CPC分类号： G01Q10/045 , G01Q60/34 , G01Q60/38 , G01Q70/06
摘要： An apparatus is provided and includes a cantilever having a tip at a distal end thereof disposed with the tip positioned an initial distance from a sample and a circuit electrically coupled to a substrate on which the sample is layered and the cantilever to simultaneously apply direct and alternating currents to deflect the cantilever and to cause the tip to oscillate about a point at a second distance from the sample, which is shorter than the initial distance, between first positions, at which the tip contacts the sample, and second positions, at which the tip is displaced from the sample.
摘要翻译： 提供了一种装置，其包括悬臂，该悬臂具有在其末端处的尖端，其顶端设置有与样品和电耦合到其上层叠有样品的基底的电路的初始距离，并且悬臂同时施加直接和交替 电流使悬臂偏转，并引起尖端围绕与样品相距离第一距离处的第二距离处的第一距离处的尖端振荡，第一位置与尖端接触样品的第一位置之间以及第二位置 尖端从样品中移位。
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公开(公告)号：US08026719B2
公开(公告)日：2011-09-27
申请号：US12245171
申请日：2008-10-03
申请人： Peter Baechtold , Urs T. Duerig , Walter Haeberle , Armin W. Knoll , Charalampos Pozidis , Deepak Ranjan Sahoo , Gian R. Salis , Abu Sebastian
发明人： Peter Baechtold , Urs T. Duerig , Walter Haeberle , Armin W. Knoll , Charalampos Pozidis , Deepak Ranjan Sahoo , Gian R. Salis , Abu Sebastian
IPC分类号： G01R33/00
CPC分类号： G01R33/091 , H01L43/08
摘要： A topography sensor and method include a probe configured to traverse a surface to determine a topography. A stray magnetic field is disposed in proximity to the probe. A magneto-resistive sensor is configured so that the stray magnetic field passing through it changes in accordance with positional changes of the probe as the probe tip traverses the surface.
摘要翻译： 地形传感器和方法包括配置成横穿表面以确定地形的探针。 杂散磁场设置在探头附近。 磁阻传感器构造成使得当探针尖端穿过表面时，通过它的杂散磁场根据探针的位置变化而变化。
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公开(公告)号：US20100085056A1
公开(公告)日：2010-04-08
申请号：US12245171
申请日：2008-10-03
申请人： Peter Baechtold , Urs T. Duerig , Walter Haeberle , Armin W. Knoll , Charalampos Pozidis , Deepak Ranjan Sahoo , Gian R. Salis , Abu Sebastian
发明人： Peter Baechtold , Urs T. Duerig , Walter Haeberle , Armin W. Knoll , Charalampos Pozidis , Deepak Ranjan Sahoo , Gian R. Salis , Abu Sebastian
CPC分类号： G01R33/091 , H01L43/08
摘要： A topography sensor and method include a probe configured to traverse a surface to determine a topography. A stray magnetic field is disposed in proximity to the probe. A magneto-resistive sensor is configured so that the stray magnetic field passing through it changes in accordance with positional changes of the probe as the probe tip traverses the surface.
摘要翻译： 地形传感器和方法包括配置成横穿表面以确定地形的探针。 杂散磁场设置在探头附近。 磁阻传感器构造成使得当探针尖端穿过表面时，通过它的杂散磁场根据探针的位置变化而变化。
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10.发明授权公开(公告)号：US07627438B1
公开(公告)日：2009-12-01
申请号：US11796205
申请日：2007-04-27
CPC分类号： G01Q60/32 , G01Q10/065
摘要： An observer based Q control method for a cantilever in an atomic force microscopy is provided that provides for a “dual” Q behavior such that a particular effective Q is achieved when a sample is present and another effective Q when a sample is absent. In the control method, the transfer function from dither input to photo-diode output is independent of the observer so that the cantilever effectively behaves like a spring-mass-damper system. The effective quality factor and stiffness of the cantilever can be changed by appropriately choosing the state feedback gain. The method provides sample-imaging using transient atomic force microscopy.
摘要翻译： 提供了一种用于原子力显微镜中的悬臂的基于观察者的Q控制方法，其提供了“双重”Q行为，使得当存在样品时获得特定的有效Q并且当样品不存在时实现另一有效Q。 在控制方法中，从抖动输入到光电二极管输出的传递函数独立于观察者，使得悬臂有效地像弹簧 - 质量 - 阻尼器系统。 可以通过适当选择状态反馈增益来改变悬臂的有效质量因子和刚度。 该方法提供使用瞬态原子力显微镜的样品成像。
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