公开(公告)号：US5430666A

公开(公告)日：1995-07-04

申请号：US992559

申请日：1992-12-18

申请人： Francesco E. DeAngelis ,  Michael R. Davison ,  David K. Leigh

发明人： Francesco E. DeAngelis ,  Michael R. Davison ,  David K. Leigh

IPC分类号： B29C67/00 ,  G05B19/401 ,  G01C25/00 ,  G01B11/00 ,  G12B13/00

CPC分类号： B29C67/0077 ,  G05B19/4015 ,  Y02P90/265

摘要： A method and apparatus for calibrating the scan of a laser over a planar surface that includes defining an error table having x-dimension and y-dimension correction factors, and also a scale factor, for each of a plurality of regions of the planar target surface. The scale factor is initially set to a value to account for differences in the size of the image field to be scanned and the overall scan field in the CAD data base. Adjustment is performed to each scale factor to account for theoretical differences due to the use of a perpendicular galvanometer-driven mirror scanning system. A sheet with a large number of square cells is then placed over the target surface, after rotational alignment, and the laser marks each cell. The sheet is then converted into digital form by scanning, and the location of the laser mark relative to the centroid of the cell is used to update the correction factors for that cell.

摘要翻译： 一种用于校准激光在平面上的扫描的方法和装置，包括：对于平面目标表面的多个区域中的每个区域定义具有x维度和y维度校正因子的误差表以及比例因子 。 比例因子最初设置为一个值，以考虑要扫描的图像字段的大小和CAD数据库中的整体扫描字段的差异。 对于每个比例因子进行调整，以解决由于使用垂直检流计驱动的镜像扫描系统而产生的理论差异。 然后在旋转对准之后将具有大量方形电池的片放置在目标表面上，并且激光对每个电池进行标记。 然后通过扫描将薄片转换成数字形式，并且使用相对于单元的质心的激光标记的位置来更新该单元的校正因子。

公开(公告)号：US4891819A

公开(公告)日：1990-01-02

申请号：US298109

申请日：1989-01-17

申请人： Leroy V. Sutter, Jr. ,  Harold A. Cameron ,  Michael R. Davison

发明人： Leroy V. Sutter, Jr. ,  Harold A. Cameron ,  Michael R. Davison

IPC分类号： H01S3/0975

CPC分类号： H01S3/0975

摘要： A transversely RF excited gas laser with an internally folded resonator includes an elongated chamber of cross-sectional dimensions suitable for confining a laser gas discharge, a plurality of reflectors and a laser gas. The reflectors form a stable folded laser resonator cavity of a compact geometry in order to efficiently extract laser power from the laser resonator cavity. There are at least two of the reflectors and at least one of the plurality of reflectors is concave. The laser gas is disposed in the folded resonator cavity which reflect and guide light energy from the laser gas discharge within the elongated chamber. The transversely RF excited gas laser with an internally folded resonator also includes a pair of electrodes and a pair of cooling electrodes. The electrodes are transversely disposed on the elongated chamber and excite the laser gas. The cooling electrodes are transversely disposed on the elongated chamber and electrically coupled to ground. The impedance-matching circuit applies RF power to the electrodes. The impedance-matching circuit includes three inductors with a center-tapped coil being adjusted so that the voltage potential at the center of the laser discharge between the pair of cooling electrodes is a virtual ground thereby preventing RF current from passing through the grounded cooling electrodes in order to efficiently extract laser power from the laser resonator cavity.

摘要翻译： 具有内部折叠谐振器的横向RF激发气体激光器包括适于限制激光气体放电，多个反射器和激光气体的细长的横截面尺寸室。 反射器形成紧凑几何形状的稳定的折叠激光谐振腔，以便有效地从激光谐振器腔提取激光功率。 存在至少两个反射器，并且多个反射器中的至少一个反射器是凹形的。 激光气体设置在折叠的谐振腔中，其反射并引导来自细长室内的激光气体放电的光能。 具有内部折叠谐振器的横向RF激发气体激光器还包括一对电极和一对冷却电极。 电极横向设置在细长室上并激发激光气体。 冷却电极横向地设置在细长室上并电耦合到地面。 阻抗匹配电路对电极施加RF功率。 阻抗匹配电路包括三个具有中心抽头线圈的电感器，使得在一对冷却电极之间的激光放电中心处的电压电位为虚拟接地，从而防止RF电流通过接地的冷却电极 以便有效地从激光谐振腔中提取激光功率。