公开(公告)号：US5131023A

公开(公告)日：1992-07-14

申请号：US659871

申请日：1991-02-22

申请人： Mikiko Yasugaki ,  Yoshiaki Horikawa

发明人： Mikiko Yasugaki ,  Yoshiaki Horikawa

IPC分类号： G02B17/00 ,  G02B21/02 ,  G21K7/00

CPC分类号： G21K7/00

摘要： An imaging X-ray microscope having an X-ray radiation source, a condenser for condensing X-rays radiated from the X-ray source on an object, an objective for forming an image of the object by the X-rays transmitted through or diffracted by the object, and an X-ray detector for receiving the image formed by the objective, the objective comprising a Schwarzschild optical system in which a concave mirror with an opening in the center thereof and a convex mirror are coaxially arranged in such a manner that the convex mirror opposes to the opening of the concave mirror, the object-side numerical aperture is at least 0.24, and the following condition is satisfied:(N.A.-0.6)/12.ltoreq.(W.sub.2 -W.sub.1)/f.ltoreq.-0.005where N.A. is the object-side numerical aperture of the Schwarzschild optical system, W.sub.1 is the distance from the object to the center of curvature of the concave mirror, W.sub.2 is the distance from the object to the center of curvature of the convex mirror, and f is the focal length of the Schwarzschild optical system.

摘要翻译： 一种具有X射线辐射源的成像X射线显微镜，用于将从X射线源辐射的X射线聚焦在物体上的冷凝器，用于通过透射或衍射的X射线形成物体的图像的目的 以及用于接收由该物镜形成的图像的X射线检测器，该目标包括施瓦茨尔光学系统，其中具有其中心具有开口的凹面镜和凸面镜同轴地布置，使得 凸镜与凹面镜的开口相对，物侧数值孔径至少为0.24，满足以下条件：（NA-0.6）/ 12（W2-W1）/ f -0.005其中NA是Schwarzschild光学系统的物体侧数值孔径，W1是从物体到凹面镜的曲率中心的距离，W2是从物体到凸面镜的中心的距离 ，f是施瓦茨的焦距 ild光学系统。