公开(公告)号：US6110625A

公开(公告)日：2000-08-29

申请号：US248375

申请日：1999-02-10

申请人： Chun-Hsiang Wen ,  Shu-Huei Cheng ,  Hua-Chi Cheng ,  Yaw-Ting Wu ,  Ming-Shiang Jan ,  Pao-Ju Hsieh ,  Jun-Ichi Yasukawa ,  Hajime Kuwahara

发明人： Chun-Hsiang Wen ,  Shu-Huei Cheng ,  Hua-Chi Cheng ,  Yaw-Ting Wu ,  Ming-Shiang Jan ,  Pao-Ju Hsieh ,  Jun-Ichi Yasukawa ,  Hajime Kuwahara

IPC分类号： G02B5/20 ,  G02F1/1335

CPC分类号： G02B5/201

摘要： The invention relates to a method for manufacturing color filters utilizing a color electrodeposition coating which contains an anionic electrodeposition resin having a low acid value. Said method comprises coating a layer of positive photoresist onto a transparent electrically conductive substrate, exposing the substrate under a photomask or photomasks to form regions of different initial levels of exposure energy, exposing the entire surface of the substrate through an energy-incrementing way to, progressively, allow all regions of the substrate to achieve an energy sufficient to completely expose the photoresist on each corresponding region, developing stepwise each region with a same developer solution to cause the electrically conductive substrate of the corresponding region uncovered, electrodepositing said region with a color electrodeposition coating containing an anionic electrodeposition resin having a low acid value to finish the pixel arrangements of the desired colors and completely exposing the substrate. The low acid value anionic electrodeposition resin utilized in the invention has an acid value of 1 to 70 mg KOH/g. The method of the invention shows the advantages of having a high degree of freedom in pattern figures and a wide process window. Moreover, the manufacture color filters of large surface and the perfect yield rate of products are possible.

摘要翻译： 本发明涉及一种使用含有酸度低的阴离子电沉积树脂的彩色电沉积涂料制造滤色器的方法。 所述方法包括将一层正性光致抗蚀剂涂覆在透明导电基板上，将光刻掩模或光掩模下的基板曝光以形成不同初始曝光能量的区域，通过能量递增方式暴露基板的整个表面， 逐渐地允许衬底的所有区域实现足以完全暴露每个对应区域上的光致抗蚀剂的能量，用相同的显影剂溶液逐步展开每个区域以使对应区域的导电衬底未被覆盖，用颜色电沉积所述区域 电沉积涂层含有具有低酸值的阴离子电沉积树脂以完成所需颜色的像素排列并完全曝光基底。 本发明中使用的低酸值阴离子电沉积树脂的酸值为1至70mg KOH / g。 本发明的方法显示了在图案图形和宽的工艺窗口中具有高自由度的优点。 此外，制造大面积的滤色片和产品的完美产率是可能的。