公开(公告)号：US06984540B2

公开(公告)日：2006-01-10

申请号：US10626822

申请日：2003-07-23

申请人： Mitihiko Takase ,  Michio Okajima ,  Akihisa Yoshida ,  Kentaro Setsune ,  Kouzou Murakami ,  Kunihiro Fujii

发明人： Mitihiko Takase ,  Michio Okajima ,  Akihisa Yoshida ,  Kentaro Setsune ,  Kouzou Murakami ,  Kunihiro Fujii

IPC分类号： H01I21/00

CPC分类号： H03H3/08 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01046 ,  H01L2924/01078 ,  H03H9/02645 ,  H03H9/02921 ,  H03H9/14541

摘要： A surface acoustic wave device includes a piezoelectric substrate, a first interdigital transducer and a second interdigital transducer formed on the substrate so that the first and second interdigital transducers are opposed to each other. The substrate includes a doping region that is doped with a substance in at least one form selected from the group consisting of atoms, molecules and clusters in a surface between the first and second interdigital transducers.

摘要翻译： 表面声波装置包括形成在基板上的压电基板，第一叉指式换能器和第二叉指换能器，使得第一和第二叉指式换能器彼此相对。 衬底包括掺杂有选自第一和第二叉指换能器之间的表面中的原子，分子和簇的至少一种形式的物质的掺杂区域。