公开(公告)号：US07056037B2

公开(公告)日：2006-06-06

申请号：US10995668

申请日：2004-11-23

申请人： Yukihiro Ozeki ,  Kazumi Furuta ,  Hiroaki Ueda ,  Manami Kuiseko ,  Koujirou Sekine ,  Mitsuru Yokoyama ,  Naoki Mitsugi ,  Koji Horii

发明人： Yukihiro Ozeki ,  Kazumi Furuta ,  Hiroaki Ueda ,  Manami Kuiseko ,  Koujirou Sekine ,  Mitsuru Yokoyama ,  Naoki Mitsugi ,  Koji Horii

IPC分类号： G02B6/34 ,  G02B6/42

CPC分类号： G02B6/4246 ,  G02B6/29308 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/4214

摘要： An optical bidirectional module 10 having therein light emitting element 11 which transmits optical signal to the end facet of the optical fiber, light receiving element 12 which receives optical signal from the end facet of the optical fiber and stair-shaped multi-level grating 15, wherein the stair-shaped multi-level grating separates the first light path between the end facet of optical fiber and the light emitting element and the second light path between the end facet of optical fiber and the light receiving element by a different wavelength of each optical signal, when the module mixes and separates optical signal with different wavelengths traveling in opposite directions related to the end facet of the optical fiber 1, used for bidirectional optical fiber communication by means of a wavelength multiplex system.

摘要翻译： 光双向模块10，其中具有将光信号传输到光纤的端面的发光元件11，从光纤的端面接收光信号的光接收元件12和楼梯状多电平光栅15， 其中所述台阶多级光栅将光纤的端面与发光元件之间的第一光路与光纤的端面之间的第二光路与光接收元件之间的每个光学不同波长分开 信号，当模块将用于通过波长多路复用系统进行双向光纤通信的与光纤1的端面相反的相反方向行进的不同波长的光信号混合并分离时，信号。

公开(公告)号：US20050175295A1

公开(公告)日：2005-08-11

申请号：US10995668

申请日：2004-11-23

申请人： Yukihiro Ozeki ,  Kazumi Furuta ,  Hiroaki Ueda ,  Manami Kuiseko ,  Koujirou Sekine ,  Mitsuru Yokoyama ,  Naoki Mitsugi ,  Koji Horii

发明人： Yukihiro Ozeki ,  Kazumi Furuta ,  Hiroaki Ueda ,  Manami Kuiseko ,  Koujirou Sekine ,  Mitsuru Yokoyama ,  Naoki Mitsugi ,  Koji Horii

IPC分类号： G02B6/42 ,  G02B6/34 ,  G02B6/35 ,  G02B6/36

CPC分类号： G02B6/4246 ,  G02B6/29308 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/4214

摘要： An optical bidirectional module 10 having therein light emitting element 11 which transmits optical signal to the end facet of the optical fiber, light receiving element 12 which receives optical signal from the end facet of the optical fiber and stair-shaped multi-level grating 15, wherein the stair-shaped multi-level grating separates the first light path between the end facet of optical fiber and the light emitting element and the second light path between the end facet of optical fiber and the light receiving element by a different wavelength of each optical signal, when the module mixes and separates optical signal with different wavelengths traveling in opposite directions related to the end facet of the optical fiber 1, used for bidirectional optical fiber communication by means of a wavelength multiplex system.

摘要翻译： 光双向模块10，其中具有将光信号传输到光纤的端面的发光元件11，从光纤的端面接收光信号的光接收元件12和楼梯状多电平光栅15， 其中所述台阶多级光栅将光纤的端面与发光元件之间的第一光路与光纤的端面之间的第二光路与光接收元件之间的每个光学不同波长分开 信号，当模块将用于通过波长多路复用系统进行双向光纤通信的与光纤1的端面相反的相反方向行进的不同波长的光信号混合并分离时，信号。

公开(公告)号：US07358483B2

公开(公告)日：2008-04-15

申请号：US11472700

申请日：2006-06-22

申请人： Naoki Mitsugi ,  Hiroshi Miyakoshi ,  Yoshiki Shibuya

发明人： Naoki Mitsugi ,  Hiroshi Miyakoshi ,  Yoshiki Shibuya

IPC分类号： H01J5/02

CPC分类号： G02B7/025 ,  G02B27/62

摘要： In the optical element fixing method, when optical element 10 is adhesively fixing member 20 by using the optical-curing adhesive, the optical-curing adhesive is applied on at least one of the adhesion sections of the optical element and the adhesive section of the fixing member, and the optical-curing adhesive is irradiated with the light from the light source through the loading jig while the load is being applied to the adhesion fixing section through loading jig 31 made of light-transmissive material.

摘要翻译： 在光学元件固定方法中，当光学元件10是通过使用光学固化粘合剂的粘合固定构件20时，光学固化粘合剂被施加到光学元件的粘合部分和固定的粘合部分中的至少一个上 并且通过装载夹具照射来自光源的光，同时通过由透光材料制成的装载夹具31将负载施加到粘合固定部分。

公开(公告)号：US20070096020A1

公开(公告)日：2007-05-03

申请号：US11472700

申请日：2006-06-22

申请人： Naoki Mitsugi ,  Hiroshi Miyakoshi ,  Yoshiki Shibuya

发明人： Naoki Mitsugi ,  Hiroshi Miyakoshi ,  Yoshiki Shibuya

IPC分类号： H01J5/02 ,  H01J40/14

CPC分类号： G02B7/025 ,  G02B27/62

摘要： In the optical element fixing method, when optical element 10 is adhesively fixing member 20 by using the optical-curing adhesive, the optical-curing adhesive is applied on at least one of the adhesion sections of the optical element and the adhesive section of the fixing member, and the optical-curing adhesive is irradiated with the light from the light source through the loading jig while the load is being applied to the adhesion fixing section through loading jig 31 made of light-transmissive material.

摘要翻译： 在光学元件固定方法中，当光学元件10是通过使用光学固化粘合剂的粘合固定构件20时，光学固化粘合剂被施加到光学元件的粘合部分和固定的粘合部分中的至少一个上 并且通过装载夹具照射来自光源的光，同时通过由透光材料制成的装载夹具31将负载施加到粘合固定部分。

公开(公告)号：US20060037937A1

公开(公告)日：2006-02-23

申请号：US11202824

申请日：2005-08-12

申请人： Naoki Mitsugi ,  Kazumi Furuta ,  Motohiro Yamada

发明人： Naoki Mitsugi ,  Kazumi Furuta ,  Motohiro Yamada

IPC分类号： B44C1/22 ,  C03C25/68 ,  H01L21/461

CPC分类号： H01L21/3085 ,  H01L21/30655

摘要： A plasma etching method for processing a substrate material, wherein a deposition process (S09) that uses a deposition gas as a process and an etching process (S11) that uses an etching gas as a process gas are alternately and repeatedly executed, thereby etching a substrate material, and a vacuuming process (S10, S13) is interposed between the two processes so that the process gas which has just finished being used is expelled out when the process gases are switched. Thus, the etching gas and the deposition gas do not mix during each process, thereby accurately creating a high-aspect-ratio recessed and protruding pattern on the surface of a substrate material.

摘要翻译： 交替重复执行用于处理基板材料的等离子体蚀刻方法，其中使用沉积气体作为工艺的沉积工艺（S 09）和使用蚀刻气体作为处理气体的蚀刻工艺（S11） 蚀刻基板材料，并且在两个处理之间插入真空处理（S10，S13），使得当处理气体被切换时，刚刚完成的处理气体被排出。 因此，蚀刻气体和沉积气体在每个处理期间不混合，从而在基板材料的表面上精确地产生高纵横比的凹凸图案。