公开(公告)号：US20110139070A1

公开(公告)日：2011-06-16

申请号：US12964921

申请日：2010-12-10

申请人： Kazuya NABETA ,  Naoki UKAE ,  Mitsunori TAKESHITA

发明人： Kazuya NABETA ,  Naoki UKAE ,  Mitsunori TAKESHITA

IPC分类号： C23C16/52 ,  C23C16/458 ,  C23C16/46 ,  C23C16/455

CPC分类号： C23C16/46 ,  C23C16/458 ,  C23C16/4586 ,  C23C16/52 ,  H01J37/32082 ,  H01J37/3266 ,  H01L21/67109 ,  H01L21/68785 ,  H01L21/68792

摘要： A stable and highly reliable device for detecting damage or contact failures of respective parts is provided. The device includes a processing chamber for processing a substrate; a heater for heating the substrate; a substrate support accommodating the heater and installed inside the processing chamber; a shaft for supporting the substrate support; a wire inserted through the shaft; a supporting unit for holding the wire; and a temperature detector connected to the supporting unit.

摘要翻译： 提供了一种用于检测各部件的损坏或接触故障的稳定且高可靠性的装置。 该装置包括用于处理基板的处理室; 用于加热基板的加热器; 容纳加热器并安装在处理室内的基板支撑件; 用于支撑所述基板支撑件的轴; 通过轴插入的电线; 用于保持电线的支撑单元; 以及连接到支撑单元的温度检测器。

公开(公告)号：US09305820B2

公开(公告)日：2016-04-05

申请号：US12964921

申请日：2010-12-10

申请人： Kazuya Nabeta ,  Naoki Ukae ,  Mitsunori Takeshita

发明人： Kazuya Nabeta ,  Naoki Ukae ,  Mitsunori Takeshita

IPC分类号： C23C16/458 ,  H01L21/67 ,  H01L21/687 ,  H01J37/32

CPC分类号： C23C16/46 ,  C23C16/458 ,  C23C16/4586 ,  C23C16/52 ,  H01J37/32082 ,  H01J37/3266 ,  H01L21/67109 ,  H01L21/68785 ,  H01L21/68792

摘要： A stable and highly reliable device for detecting damage or contact failures of respective parts is provided. The device includes a processing chamber for processing a substrate; a heater for heating the substrate; a substrate support accommodating the heater and installed inside the processing chamber; a shaft for supporting the substrate support; a wire inserted through the shaft; a supporting unit for holding the wire; and a temperature detector connected to the supporting unit.

摘要翻译： 提供了一种用于检测各部件的损坏或接触故障的稳定且高可靠性的装置。 该装置包括用于处理基板的处理室; 用于加热基板的加热器; 容纳加热器并安装在处理室内的基板支撑件; 用于支撑所述基板支撑件的轴; 通过轴插入的电线; 用于保持电线的支撑单元; 以及连接到支撑单元的温度检测器。