Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements
    3.
    发明授权
    Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements 有权
    具有嵌入式相干电磁辐射干涉仪的位移传感器,用于微尺度接近测量

    公开(公告)号:US08437006B2

    公开(公告)日:2013-05-07

    申请号:US12958577

    申请日:2010-12-02

    IPC分类号: G01B9/02

    CPC分类号: G01B9/02051 G01B9/02012

    摘要: The present invention is an interferometer sensor which uses frequency modulated coherent electromagnetic radiation to noncontact measure the displacement of moving targets with high precision. The sensor has an embedded interferometer comprised of an electromagnetic radiation source, a plurality of electromagnetic waveguides, interferometric and extension waveguides, a refractive index gel, or angled end face and an electromagnetic radiation detector.

    摘要翻译: 本发明是一种使用调频相干电磁辐射非接触式测量高精度移动目标位移的干涉仪传感器。 传感器具有由电磁辐射源,多个电磁波导,干涉测量和延伸波导,折射率凝胶或角度端面和电磁辐射探测器组成的嵌入式干涉仪。

    Displacement Sensor with Embedded Coherent Electromagnetic Radiation Interferometer for Micro Scale Proximity Measurements
    4.
    发明申请
    Displacement Sensor with Embedded Coherent Electromagnetic Radiation Interferometer for Micro Scale Proximity Measurements 有权
    具有嵌入式相干电磁辐射干涉仪的位移传感器用于微尺度接近度测量

    公开(公告)号:US20120162661A1

    公开(公告)日:2012-06-28

    申请号:US12958577

    申请日:2010-12-02

    IPC分类号: G01B9/02

    CPC分类号: G01B9/02051 G01B9/02012

    摘要: The present invention is an interferometer sensor which uses frequency modulated coherent electromagnetic radiation to noncontact measure the displacement of moving targets with high precision. The sensor has an embedded interferometer comprised of an electromagnetic radiation source, a plurality of electromagnetic waveguides, interferometric and extension waveguides, a refractive index gel, or angled end face and an electromagnetic radiation detector.

    摘要翻译: 本发明是一种使用调频相干电磁辐射非接触式测量高精度移动目标位移的干涉仪传感器。 传感器具有由电磁辐射源,多个电磁波导,干涉测量和延伸波导,折射率凝胶或角度端面和电磁辐射探测器组成的嵌入式干涉仪。