公开(公告)号：US20240175673A1

公开(公告)日：2024-05-30

申请号：US18517362

申请日：2023-11-22

申请人： Murata Manufacturing Co., Ltd.

发明人： Ville KAAJAKARI

IPC分类号： G01B9/02

CPC分类号： G01B9/02051

摘要： An interferometer is provided that includes a reflection region, a support region and two or more actuation regions. Each of the two or more actuation regions extend from the support region to the reflection region. A first reflector is fixed to the substrate at least in the reflection region. The interferometer includes a piezoelectric layer at least in the two or more actuation regions. Moreover, a second reflector is attached to the piezoelectric layer.

公开(公告)号：US20240175672A1

公开(公告)日：2024-05-30

申请号：US18071652

申请日：2022-11-30

申请人： Axalume, Inc.

发明人： Yossef Ehrlichman ,  Vinod Krishnamoorthy ,  Ashok V. Krishnamoorthy

IPC分类号： G01B9/02 ,  G01B9/02004 ,  G01B9/02015

CPC分类号： G01B9/02051 ,  G01B9/02004 ,  G01B9/02027 ,  G01B9/02083

摘要： An integrated circuit that includes a wavelength meter is described. This integrated circuit may include: a set of interferometers having integer multiples of a phase or a delay, where the set of interferometers provide outputs corresponding to a range from an MSB to an LSB of a wavelength in an optical signal. For example, the set of interferometers may include MZIs or ring resonators. Moreover, the integrated circuit may include a converter that provides digital electrical signals that specify the range from the MSB to the LSB. Note that the set of interferometers may have different FSRs, where an interferometer that provides an output corresponding to the MSB has a largest FSR and a smallest phase or delay, and a second interferometer that provides a second output corresponding to the LSB has a smallest FSR and a largest phase or delay.

公开(公告)号：US11828592B2

公开(公告)日：2023-11-28

申请号：US16841152

申请日：2020-04-06

申请人： Nokia Technologies Oy

发明人： David Bitauld

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01B9/02015 ,  G02B6/42

CPC分类号： G01B9/02051 ,  G01B9/02027 ,  G02B6/4214 ,  G02B6/4246

摘要： An apparatus comprising: a void; an interferometer detector; and



light guide means for guiding a light signal along a light path to the interferometer detector wherein the light path comprises a cantilever light guide that is supported such that a free-end can move within the void and the interferometer detector is configured to detect a deflection of the free-end of the cantilever light guide; and
a reflector, wherein the cantilever light guide comprises a light outcoupler configured to out-couple the light signal to extend the light path from the cantilever light guide to the reflector.

公开(公告)号：US20230221106A1

公开(公告)日：2023-07-13

申请号：US18121164

申请日：2023-03-14

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Gugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J3/02 ,  B81B3/00 ,  G02B27/14 ,  G02B26/08 ,  G02B7/182 ,  G01J3/10 ,  G01J3/14 ,  G01J3/453

CPC分类号： G01B9/02051 ,  G01J3/45 ,  G01J3/0202 ,  G01J3/021 ,  B81B3/00 ,  G02B27/144 ,  B81B3/0021 ,  B81B3/007 ,  G02B26/0816 ,  G02B7/182 ,  G01J3/108 ,  G01J3/0237 ,  G01B9/02049 ,  G02B26/0833 ,  G01J3/14 ,  G02B26/0841 ,  G01B2290/35 ,  G01J3/4532 ,  G01B2290/25 ,  B81B2203/0154 ,  G01J3/4535 ,  G01J2003/104 ,  B81B2201/042

摘要： In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

公开(公告)号：US20170328702A1

公开(公告)日：2017-11-16

申请号：US15355068

申请日：2016-11-18

申请人： Kris Vossough ,  Farhang Yazdani

发明人： Kris Vossough ,  Farhang Yazdani

IPC分类号： G01B9/02

CPC分类号： G01B9/02051 ,  B81B3/0083 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/047 ,  B81B2207/012 ,  G01D5/35312 ,  G01D21/02 ,  G01L11/02 ,  G01P15/0802 ,  G01P15/093

摘要： This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The system uses Fabry-Perot Interferometer in conjunction with beam collimator, beam splitter, optical waveguide and a photodetector integrated. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.

公开(公告)号：US09778020B2

公开(公告)日：2017-10-03

申请号：US15159601

申请日：2016-05-19

申请人： Carl Zeiss Meditec, Inc.

发明人： Alexandre R. Tumlinson ,  Matthew J. Everett

IPC分类号： A61B3/14 ,  A61B3/00 ,  G01B9/02 ,  A61B3/10

CPC分类号： G01B9/02015 ,  A61B3/102 ,  G01B9/02051 ,  G01B9/02091 ,  G01B2290/70

摘要： Efficient interferometer designs for optical coherence tomography (OCT) systems are presented. One example interferometer design includes two polarization dependent beamsplitters and a non-polarization dependent combiner. The first polarization dependent beamsplitter transmits light in a first polarization state to a sample arm of the OCT system and transmits light in a second polarization state different from the first polarization state to a reference arm of the system. The second polarization dependent beamsplitter transmits light returning from a sample to the non-polarization dependent combiner. The combiner combines light returned from the sample and the light that has passed through the reference arm, which is then detected at a detector. Another example interferometer design includes free space optics comprising a non-reciprocal beamsplitting element in a beam path from a light source to a sample. The non-reciprocal beamsplitting element is implemented using a combination of a polarization dependent beamsplitter and a polarization manipulator.

公开(公告)号：US20170052016A1

公开(公告)日：2017-02-23

申请号：US15237299

申请日：2016-08-15

申请人： MEDLUMICS S.L.

发明人： Juan SANCHO DURÁ ,  Alberto MARTIN ,  José Luis RUBIO GUIVERNAU ,  Eduardo MARGALLO BALBÁS

IPC分类号： G01B9/02

CPC分类号： G01B9/02091 ,  A61B3/102 ,  G01B9/02028 ,  G01B9/02051 ,  G01B2290/35 ,  G01B2290/40 ,  G02B6/12004 ,  G02B6/2861 ,  G02B6/43 ,  G02B2006/12142

摘要： A Time Domain Optical Coherence Tomography system using a modulation scheme multiplexes the scanning range of the delay line into different spectral bands. Such a modulation scheme may allow for power consumption reduction compared with a single delay line element since the same modulation pattern is being used for several channels. In an example, the optical coherence tomography system may include a plurality of stages, each stage having a group delay element. The distinct group delays may be introduced to scan a sample with distinct electrical frequency bands at distinct axial scanning depth ranges.

摘要翻译： 使用调制方式的时域光学相干层析成像系统将延迟线的扫描范围复用到不同的光谱带中。 与单个延迟线元件相比，这种调制方案可以减少功率消耗，因为相同的调制模式被用于多个通道。 在一个示例中，光学相干断层摄影系统可以包括多个级，每个级具有组延迟元件。 可以引入不同的组延迟以在不同的轴向扫描深度范围扫描具有不同电频带的样品。

公开(公告)号：US20170052015A1

公开(公告)日：2017-02-23

申请号：US15244503

申请日：2016-08-23

申请人： Eric Swanson

发明人： Eric Swanson ,  Christopher Doerr

IPC分类号： G01B9/02

CPC分类号： G01B9/02051 ,  G01B9/02004 ,  G01B9/02069 ,  G01B9/02091

摘要： Disclosed herein are optical integration technologies, designs, systems and methods directed toward Optical Coherence Tomography (OCT) and other interferometric optical sensor, ranging, and imaging systems wherein such systems, methods and structures employ tunable optical sources, coherent detection and other structures on a single or multichip monolithic integration. In contrast to contemporary, prior-art OCT systems and structures that employ simple, miniature optical bench technology using small optical components positioned on a substrate, systems and methods according to the present disclosure employ one or more photonic integrated circuits (PICs), use swept-source techniques, and employ a widely tunable optical source(s).

摘要翻译： 本文公开的是针对光学相干层析成像（OCT）和其他干涉光学传感器，范围和其中这样的系统，方法和结构采用可调谐光源，相干检测和其他结构的光学集成技术，设计，系统和方法 单芯片或多芯片单片集成。 与采用使用位于衬底上的小型光学组件的简单的微型光学平台技术的现代的现有技术的OCT系统和结构不同，根据本公开的系统和方法采用一个或多个光子集成电路（PIC），使用扫描 源技术，并采用广泛可调谐的光源。

公开(公告)号：US09372285B2

公开(公告)日：2016-06-21

申请号：US14117089

申请日：2012-04-04

申请人： Yoshihisa Warashina ,  Tomofumi Suzuki ,  Kohei Kasamori

发明人： Yoshihisa Warashina ,  Tomofumi Suzuki ,  Kohei Kasamori

IPC分类号： G02B1/10 ,  G02B1/115 ,  G01B9/02 ,  G01J3/453 ,  G02B26/06 ,  G02B26/08

CPC分类号： G02B1/115 ,  G01B9/02051 ,  G01B9/02056 ,  G01J3/4535 ,  G02B26/06 ,  G02B26/0841

摘要： A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.

摘要翻译： 一种透光性光学部件的制造方法，包括通过对板状部件的硅区域进行蚀刻来形成凹部的第一蚀刻工序，通过热氧化内侧形成氧化硅膜的热氧化工序 凹部的表面，以及形成覆盖氧化硅膜的氮化硅膜的氮化膜形成工序。 因此，可以实现能够在相对于基板表面大倾斜（或接近垂直）的半透射反射面上均匀地形成氧化硅膜的光学部件的制造方法， 通过该方法生产的成分。

公开(公告)号：US20140376001A1

公开(公告)日：2014-12-25

申请号：US14312621

申请日：2014-06-23

申请人： Eric SWANSON

发明人： Eric SWANSON

IPC分类号： A61B6/03 ,  G01N21/17

CPC分类号： G01S7/4812 ,  A61B5/0066 ,  A61B2562/0233 ,  G01B9/02004 ,  G01B9/02051 ,  G01B9/02069 ,  G01B9/02091 ,  G01B2290/70 ,  G01N21/17 ,  G01N21/39 ,  G01N21/4795 ,  G01N2021/1787 ,  G01S17/89 ,  G02F1/292

摘要： Disclosed herein are optical integration technologies, designs, systems and methods directed toward Optical Coherence Tomography (OCT) and other interferometric optical sensor, ranging, and imaging systems wherein such systems, methods and structures employ tunable optical sources, coherent detection and other structures on a single or multichip monolithic integration. In contrast to contemporary, prior-art OCT systems and structures that employ simple, miniature optical bench technology using small optical components positioned on a substrate, systems and methods according to the present disclosure employ one or more photonic integrated circuits (PICs), use swept-source techniques, and employ a widely tunable optical source(s).In another embodiment the system uses an optical photonic phased array. The phase array can be a static phased array to eliminate or augment the lens that couples light to and from a sample of interest or can be static and use a spectrally dispersive antenna and a tunable source to perform angular sweeping. The phased array can be active in 1 or 2 dimensions so as to scan the light beam in angle. The phased array can also adjust focus. The phased array can implement an optical waveform that will extend depth of field focus for imaging. The phase array can also be a separate standalone element that is fed by one or more optical fibers. The phased array can be for scanning a biomedical specimen used in conjunction with a swept-source OCT system, can be used in a free-space coherent optical communication system for beam pointing or tracking, used in LIDAR applications, or many other beam control or beam steering applications.

摘要翻译： 本文公开的是针对光学相干层析成像（OCT）和其他干涉光学传感器，范围和其中这样的系统，方法和结构采用可调谐光源，相干检测和其他结构的光学集成技术，设计，系统和方法 单芯片或多芯片单片集成。 与采用使用位于衬底上的小型光学组件的简单的微型光学平台技术的现代的现有技术的OCT系统和结构不同，根据本公开的系统和方法采用一个或多个光子集成电路（PIC），使用扫描 源技术，并采用广泛可调谐的光源。 在另一个实施例中，系统使用光子学相位阵列。 相位阵列可以是静态相控阵列，以消除或增加将光耦合到感兴趣的样本或来自感兴趣的样本的透镜，或者可以是静态的，并且使用光谱分散天线和可调谐源执行角扫描。 相控阵可以在1或2维中有效，以扫描光束的角度。 相控阵也可以调焦。 相控阵可以实现一种光学波形，它将扩大成像的景深对焦。 相位阵列还可以是由一个或多个光纤馈送的单独独立元件。 相控阵可用于扫描与扫频源OCT系统结合使用的生物医学样本，可用于自由空间相干光通信系统，用于光束指向或跟踪，用于激光雷达应用或许多其他光束控制或 梁转向应用。