公开(公告)号：US20230361237A1

公开(公告)日：2023-11-09

申请号：US18356879

申请日：2023-07-21

申请人： Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. ,  Nines Photovoltaics

发明人： Marc Hofmann ,  Sebastian Mack ,  Bishal Kafle ,  Jochen Rentsch ,  Nabeel Wahab Khan ,  Laurent Clochard ,  Edward Duffy

IPC分类号： H01L31/18 ,  H01L31/0745

CPC分类号： H01L31/1804 ,  H01L31/0745

摘要： The embodiments relate to a method for producing a solar cell having a rear-side contact with a tunnel barrier. A monocrystalline wafer having a front side and a rear side may be provided with silicon and a dopant. A tunnel barrier is produced on the wafer, and a polycrystalline or amorphous layer is deposited on the tunnel barrier. The polycrystalline or amorphous layer includes silicon and a dopant. The polycrystalline or amorphous layer is removed on the front side by gas-phase etching.