公开(公告)号：US20100174398A1

公开(公告)日：2010-07-08

申请号：US12651879

申请日：2010-01-04

申请人： Taizan Kobayashi ,  Yukio Ozaki ,  Toshinori Kasuga ,  Yasuyuki Masuda ,  Nobuaki Kawashima

发明人： Taizan Kobayashi ,  Yukio Ozaki ,  Toshinori Kasuga ,  Yasuyuki Masuda ,  Nobuaki Kawashima

IPC分类号： B25J13/08 ,  G01C3/00 ,  G06F17/00

CPC分类号： H01L21/681 ,  H01L21/6715

摘要： A position measuring apparatus includes a distance measuring part which obtains at least three pieces of distance information between at least three measurement points on a measured plane of an object and a displacement sensor, an imaging part which images a projection image on the measured plane of the object, and a calculating part which obtains tilt information of the measured plane based on the at least three distance information pieces and obtains position information of the object based on the tilt information and the projection image.

摘要翻译： 一种位置测量装置，包括距离测量部分，其在物体的测量平面上的至少三个测量点与位移传感器之间获得至少三条距离信息，在所测量的平面上对投影图像进行成像的成像部件 对象和计算部分，其基于所述至少三个距离信息获取所测量的平面的倾斜信息，并且基于倾斜信息和投影图像获得对象的位置信息。