公开(公告)号：US20050225011A1

公开(公告)日：2005-10-13

申请号：US10508478

申请日：2003-03-14

申请人： Ivo Rangelow ,  Tzwetan Ivanov ,  Peter Hudek ,  Olaf Fortagne

发明人： Ivo Rangelow ,  Tzwetan Ivanov ,  Peter Hudek ,  Olaf Fortagne

IPC分类号： G01Q80/00 ,  G11B9/00 ,  H01J37/317 ,  H01J37/30

CPC分类号： H01J37/3174 ,  G01Q80/00 ,  G11B9/14 ,  G11B9/1409 ,  H01J37/3177

摘要： The invention relates to a device and a method for maskless microlithography. Several microstructured cantilevers (2) are arranged in an array (26) and an actuator is integrated in each of the cantilevers (2) of the array (26). A power supply and control unit (24) is provided, said unit adjusting the distance of the cantilevers (6) relative to a surface (4) that is to be structured by means of an appropriate voltage. Every point of the needles (6) is connected to said power supply and control unit (24). In order to implement the inventive method, an array (26) with cantilevers, each of which carries a point of a needle (6), is brought into contact with a surface (4) to be structured in such a way that the points of the needles (6) are arranged close to the surface (4) to be structured.

摘要翻译： 本发明涉及无掩模微光刻的装置和方法。 几个微结构的悬臂（2）布置在阵列（26）中，并且致动器集成在阵列（26）的每个悬臂（2）中。 提供电源和控制单元（24），所述单元调整悬臂（6）相对于将通过适当电压构造的表面（4）的距离。 针（6）的每一点连接到所述电源和控制单元（24）。 为了实现本发明的方法，具有悬臂的阵列（26）与每个表面（6）相连接的表面（4）与表面（4）接触，以使结构的点 针（6）布置成靠近要被构造的表面（4）。

公开(公告)号：US07141808B2

公开(公告)日：2006-11-28

申请号：US10508478

申请日：2003-03-14

申请人： Ivo Rangelow ,  Tzwetan Ivanov ,  Peter Hudek ,  Olaf Fortagne

发明人： Ivo Rangelow ,  Tzwetan Ivanov ,  Peter Hudek ,  Olaf Fortagne

IPC分类号： H01J37/30

CPC分类号： H01J37/3174 ,  G01Q80/00 ,  G11B9/14 ,  G11B9/1409 ,  H01J37/3177

摘要： The invention relates to a device and a method for maskless microlithography. Several microstructured cantilevers (2) are arranged in an array (26) and an actuator is integrated in each of the cantilevers (2) of the array (26). A power supply and control unit (24) is provided, said unit adjusting the distance of the cantilevers (6) relative to a surface (4) that is to be structured by means of an appropriate voltage. Every point of the needles (6) is connected to said power supply and control unit (24). In order to implement the inventive method, an array (26) with cantilevers, each of which carries a point of a needle (6), is brought into contact with a surface (4) to be structured in such a way that the points of the needles (6) are arranged close to the surface (4) to be structured.

摘要翻译： 本发明涉及无掩模微光刻的装置和方法。 几个微结构的悬臂（2）布置在阵列（26）中，并且致动器集成在阵列（26）的每个悬臂（2）中。 提供电源和控制单元（24），所述单元调整悬臂（6）相对于将通过适当电压构造的表面（4）的距离。 针（6）的每一点连接到所述电源和控制单元（24）。 为了实现本发明的方法，具有悬臂的阵列（26）与每个表面（6）相连接的表面（4）与表面（4）接触，以使结构的点 针（6）布置成靠近要被构造的表面（4）。