公开(公告)号：US06760406B2

公开(公告)日：2004-07-06

申请号：US09974975

申请日：2001-10-12

申请人： Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

发明人： Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

IPC分类号： H01J3500

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H05G2/006 ,  H05G2/008

摘要： In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.

摘要翻译： 在产生X射线或EUV辐射的方法中，通过出口促使物质沿着从出口的方向产生射流，至少一个能量束被引导到射流上，能量束与射流相互作用以产生 X射线或EUV辐射，并且控制出口的温度，从而提高射流的稳定性。 还公开了一种设备。