公开(公告)号：US20130206589A1

公开(公告)日：2013-08-15

申请号：US13372579

申请日：2012-02-14

申请人： Shu-Hua Hu ,  Ming-Chang Lu ,  Pai-Ying Su ,  Jung-Sheng Chen ,  Hsin-Chun Yin

发明人： Shu-Hua Hu ,  Ming-Chang Lu ,  Pai-Ying Su ,  Jung-Sheng Chen ,  Hsin-Chun Yin

IPC分类号： C23C14/54 ,  C23C14/34

CPC分类号： C23C14/3407 ,  C23C14/54

摘要： The present invention provides a sputtering target having alarm function. The sputtering target comprises: a target body including a target material and having a bonding plane; a backing body bonded with the bonding plane of the target body; and at least one alarm body embedded in the target body. Wherein, a length of each alarm body, ratios of an area of each alarm body and the sum of area(s) of the at least one alarm body projected onto the bonding plane relative to an area of the bonding plane are controlled in a suitable range. Thus, the bonding strength and the heat-removing efficiency of the sputtering target can be maintained, and the distinguishable material of the alarm body can evolve a gas component distinguishable from a sputtering environment serving as an alarm signal for stopping the sputtering process in time.

摘要翻译： 本发明提供具有报警功能的溅射靶。 溅射靶包括：包括目标材料并具有接合平面的靶体; 与目标体的接合面接合的背衬体; 以及至少一个嵌入目标体内的报警体。 其中，每个报警主体的长度，每个报警主体的面积的比率和投影到接合平面上相对于接合平面的区域的至少一个报警体的面积之和被控制在合适的 范围。 因此，可以保持溅射靶的接合强度和除热效率，并且报警体的可区分材料可以放出与作为用于在时间上停止溅射处理的报警信号的溅射环境可区分的气体成分。