公开(公告)号：US06926811B2

公开(公告)日：2005-08-09

申请号：US10419992

申请日：2003-04-22

申请人： Marcus Morstein ,  Tibor Cselle ,  Pavel Holubar ,  Mojmir Jilek ,  Peter Blösch

发明人： Marcus Morstein ,  Tibor Cselle ,  Pavel Holubar ,  Mojmir Jilek ,  Peter Blösch

IPC分类号： C23C14/00 ,  C23C14/32 ,  C23C14/34 ,  H01J37/32 ,  H01J37/34

CPC分类号： H01J37/32055 ,  C23C14/325 ,  H01J37/3402 ,  H01J2237/022

摘要： A method is provided for coating objects in a vacuum chamber in which a physical vapor deposition (PVD) can be carried out. The chamber has at least one anode means, at least one cathode and at least one magnetic field source. An arc can be ignited between the at least one anode means and the at least one cathode, and the cathode separates material. The at least one magnetic field can be turned relative to the at least one cathode and the objects to be coated are arranged in the chamber. The magnetic field is turned before the beginning of the coating process so that the separated material does not coat the objects to be coated in the coating process. The arc for the physical deposition process is produced by means of at least two cathodes, said cathodes are constructed as substantially cylindrical tubular cathodes and the at least one magnetic field source is constructed as a permanent or coil magnet arranged in the tubular cathodes and the tubular-cathodes turn about their cylinder axis during the coating process.

摘要翻译： 提供了一种在真空室中涂覆物体的方法，其中可以进行物理气相沉积（PVD）。 该室具有至少一个阳极装置，至少一个阴极和至少一个磁场源。 可以在至少一个阳极装置和至少一个阴极之间点燃电弧，并且阴极分离材料。 至少一个磁场可以相对于至少一个阴极转动，并且待涂覆的物体被布置在腔室中。 在涂覆过程开始之前转动磁场，使得分离的材料在涂布过程中不涂覆待涂覆的物体。 通过至少两个阴极产生用于物理沉积工艺的电弧，所述阴极被构造为基本上圆柱形的管状阴极，并且至少一个磁场源被构造为布置在管状阴极中的永久或线圈磁体和管状 阴极在涂覆过程中绕其圆柱轴线转动。