公开(公告)号：US06719034B2

公开(公告)日：2004-04-13

申请号：US10025284

申请日：2001-12-19

申请人： Ralf Heck ,  Rainer Jüttner ,  David Lupton ,  Egon Maier ,  Peter Mainz ,  Harald Manhardt ,  Bernd Stenger ,  Holger Zingg

发明人： Ralf Heck ,  Rainer Jüttner ,  David Lupton ,  Egon Maier ,  Peter Mainz ,  Harald Manhardt ,  Bernd Stenger ,  Holger Zingg

IPC分类号： B22D1900

CPC分类号： B22D19/16 ,  B22D9/006 ,  B22D27/04 ,  C23C14/3414

摘要： A process for producing a tube target for cathode sputtering plants, in which the tube target is formed from a metallic inner tube (target holder) made of a first material with a first melting point of Ts1≧900 K and a metallic outer tube (target) that concentrically surrounds the inner tube and that is made of a second material with a second melting point of Ts2≦800 K. The inside diameter of the outer tube and the outside diameter of the inner tube are proportioned in such a way that the two tubes fit together tightly and are mechanically firmly joined. The outer tube is formed by casting the second material in a molten state in a heated, vertical, cylindrical permanent mold, which has a heated mandrel that constitutes the inner tube. After a space between the mold and the inner tube has been filled with the molten second material, a first thermal gradient develops between the inner tube and the mold, a second thermal gradient develops between the bottom and the top of the mold, and the outer tube is simultaneously cooled from the inside to the outside and from the bottom to the top.

摘要翻译： 一种用于阴极溅射装置的管靶的制造方法，其中，所述管靶由金属内管（靶保持器）形成，所述内管由具有Ts1> 900K的第一熔点的第一材料制成，金属外管 目标），其同心地围绕内管，并且由具有Ts2 <= 800K的第二熔点的第二材料制成。外管的内径和内管的外径成比例，使得 两根管子紧紧地配合在一起，机械地牢固地连接在一起。 外管通过将熔融状态的第二材料浇铸在加热的垂直圆柱形永久模具中，该永久模具具有构成内管的加热心轴。 在模具和内管之间的空间已经填充有熔融的第二材料之后，在内管和模具之间产生第一热梯度，在模具的底部和顶部之间产生第二热梯度，并且外部 管同时从内到外冷却，从底部到顶部。