公开(公告)号：US4354113A

公开(公告)日：1982-10-12

申请号：US221308

申请日：1980-12-30

Applicant: Philip D. Goode ,  Michael J. Poole ,  Gordon W. Proctor

Inventor： Philip D. Goode ,  Michael J. Poole ,  Gordon W. Proctor

IPC: H01J3/04 ,  H01J27/02 ,  H01J27/08 ,  H01J37/08 ,  H05H7/08 ,  H01J27/00

CPC classification number: H01J27/02 ,  H01J27/08

Abstract: An ion source comprises a cylindrical chamber having a longitudinal exit slit formed therein and two parallel anode wires extending the length of the chamber in the central region thereof and symmetrically disposed with respect to the longitudinal axis of the chamber and the exit slit, wherein at each end of the exit slit there is positioned at or near the zero potential equipotential a mask, the separation of the inner ends of the masks defining the width of the ion beam emitted by the source.

Abstract translation: 离子源包括圆柱形腔室，其中形成有纵向射出狭缝，以及两个平行的阳极线，其延伸室的中心区域的长度并且相对于腔室的纵向轴线和出口狭缝对称设置，其中每个 出口狭缝的端部位于或接近零电位等电位掩模，掩模的内端的分离限定由源发射的离子束的宽度。