公开(公告)号：US20110134525A1

公开(公告)日：2011-06-09

申请号：US13026982

申请日：2011-02-14

申请人： Douglas Earl Holmgren ,  Ho Wai Lo ,  Philip Mitohell Conklin

发明人： Douglas Earl Holmgren ,  Ho Wai Lo ,  Philip Mitohell Conklin

IPC分类号： G02B5/30

CPC分类号： B23K26/067 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0608 ,  B23K2101/40

摘要： A system for forming two laser processing beams with controlled stability at a target specimen work surface includes first and second mutually coherent laser beams propagating along separate first and second beam paths that are combined to perform an optical property adjustment. The combined laser beams are separated into third and fourth laser beams propagating along separate beam paths and including respective third and fourth main beam components, and one of the third and fourth laser beams contributes a leakage component that copropagates in mutual temporal coherence with the main beam component of the other of the third and fourth laser beams. An effect of mutual temporal coherence of the leakage component and the other main beam component with which the leakage component copropagates is reduced through acousto-optic modulation frequency shifts or through incorporation of an optical path length difference in the two beams.

摘要翻译： 用于在目标样品工作表面处形成具有受控稳定性的两个激光加工光束的系统包括沿着分离的第一和第二光束路径传播的第一和第二相互相干的激光束，其被组合以执行光学性质调整。 组合的激光束被分离成沿着分离的光束路径传播的第三和第四激光束，并且包括相应的第三和第四主光束分量，并且第三和第四激光束中的一个激光束有助于在与主光束相互的时间相干性中共同传播的泄漏分量 第三和第四激光束中的另一个的分量。 通过声光调制频移或通过并入两个光束中的光程长度差，减少泄漏分量和泄漏分量共同传播的其他主光束分量的相互时间相干性的影响。