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公开(公告)号:US4426583A
公开(公告)日:1984-01-17
申请号:US376350
申请日:1982-05-10
IPC分类号: H01J37/06 , G01R31/02 , G01R31/302 , H01J37/04 , H01J37/28 , H01J37/30 , H01L21/66 , H05K3/00 , H01J3/14
CPC分类号: H01J37/04 , H01J37/3007
摘要: The electron potential of an electron beam is switched between different values without moving the focal plane by effectively changing the axial position of the electron source at the same time that the electron potential is changed. The effective change in axial position of the electron source exactly compensates for the altered effectiveness which magnetic lenses have upon an electron beam of altered electron potential such that the final focal plane remains at the same position without adjusting the field strength of any magnetic lens.
摘要翻译: 电子束的电子电位在不同值之间切换,而不会通过在电子电位改变的同时有效地改变电子源的轴向位置来移动焦平面。 电子源的轴向位置的有效变化精确地补偿了磁透镜对电子电位变化的电子束的有效性的改变,使得最终焦平面保持在相同的位置,而不调整任何磁性透镜的场强。