公开(公告)号：US20050176182A1

公开(公告)日：2005-08-11

申请号：US10777005

申请日：2004-02-10

Applicant: Ping Me ,  Warren Jackson ,  Carl Taussig ,  Albert Jeans

Inventor： Ping Me ,  Warren Jackson ,  Carl Taussig ,  Albert Jeans

IPC: G03F7/20 ,  C23C16/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L29/04 ,  H01L29/786 ,  H01L51/00

CPC classification number: H01L29/78603 ,  H01L27/12 ,  H01L27/1292 ,  H01L29/66757 ,  H01L51/0097

Abstract: An aspect of the present invention is a method for forming a plurality of thin-film devices. The method includes providing a flexible substrate and utilizing a self-aligned imprint lithography (SAIL) process to form the plurality of thin-film devices on the flexible substrate.

Abstract translation: 本发明的一个方面是形成多个薄膜器件的方法。 该方法包括提供柔性基板并利用自对准压印光刻（SAIL）工艺在柔性基板上形成多个薄膜器件。