公开(公告)号：US20110108525A1

公开(公告)日：2011-05-12

申请号：US12768859

申请日：2010-04-28

申请人： Chih-Wei CHIEN ,  Chung-Wei Cheng ,  Ping-Xiang Li ,  Jeng-Shyong Chen

发明人： Chih-Wei CHIEN ,  Chung-Wei Cheng ,  Ping-Xiang Li ,  Jeng-Shyong Chen

IPC分类号： B44C1/22 ,  C23F1/08

CPC分类号： C03C15/00 ,  C03C23/0025 ,  C30B1/023 ,  C30B29/34

摘要： The present invention provides a method and system for manufacturing a microstructure in a photosensitive glass substrate, which include the steps of generating first femtosecond laser pulses by a femtosecond laser source and focusing the first femtosecond laser pulses on a surface or an interior of the photosensitive glass substrate by a focus lens to define a modified region; generating second femtosecond laser pulses by the femtosecond laser source, adjusting a frequency of the second femtosecond laser pulses to be higher than that of the first femtosecond laser pulses by a frequency adjustment unit and an energy adjustment unit; focusing the adjusted second femtosecond laser pulses on the modified region of the photosensitive glass substrate to crystallize a substance of the modified region; and, after crystallization, etching off the crystallized region to obtain the microstructure in the photosensitive glass substrate.

摘要翻译： 本发明提供一种用于制造感光玻璃基板中微结构的方法和系统，其包括以下步骤：通过飞秒激光源产生第一飞秒激光脉冲，并将第一飞秒激光脉冲聚焦在感光玻璃的表面或内部 基板通过聚焦透镜来限定修饰区域; 通过飞秒激光源产生第二飞秒激光脉冲，通过频率调节单元和能量调节单元将第二飞秒激光脉冲的频率调整为高于第一飞秒激光脉冲的频率; 将调整后的第二飞秒激光脉冲聚焦在感光性玻璃基板的改质区域上，使改性区域的物质结晶化; 在结晶后，蚀刻出结晶化区域，得到感光性玻璃基板的微观结构。