-
公开(公告)号：US07398676B2
公开(公告)日：2008-07-15
申请号：US11382747
申请日：2006-05-11
申请人： Pyoung-Ho Lim , Jong-Kook Song , Sung-Ho Jo , Ki-Hwan Park , Tae-Gun Kim , Woo-Koen Kim
发明人： Pyoung-Ho Lim , Jong-Kook Song , Sung-Ho Jo , Ki-Hwan Park , Tae-Gun Kim , Woo-Koen Kim
IPC分类号： G01M3/04
摘要： A leak sensor and a leak sensing system are provided. The leak sensor preferably includes a fluid sensing member that is capable of sensing and indicating the presence of a fluid leaked from a fluid storage or transport member. The leak sensor further preferably includes at least two wires communicating with the fluid sensing member. The wires are preferably configured to be short-circuited when they contact the fluid leaked from the fluid storage or transport member. An electrical signal corresponding to a leak sensor location can thereby be sent to a control terminal of the leak sensing system. A portion of the wires may be arranged in a cable coated with a protective material such as Teflon®. The control box (or terminal) preferably receives electrical signals from a plurality of leak sensors. The electrical signals can provide information on whether the fluid has leaked and on which leak sensor or sensors have detected the fluid leak.
摘要翻译： 提供了一种泄漏传感器和泄漏检测系统。 泄漏传感器优选地包括流体感测构件，其能够感测并指示从流体存储或运输构件泄漏的流体的存在。 泄漏传感器还优选地包括与流体感测构件连通的至少两根线。 电线优选构造成当它们接触从流体存储或运输构件泄漏的流体时短路。 因此，可以将与泄漏传感器位置对应的电信号发送到泄漏检测系统的控制端子。 电线的一部分可以布置在涂有保护材料如Teflon的电缆中。 控制箱（或端子）优选地从多个泄漏传感器接收电信号。 电信号可以提供关于流体是否泄漏的信息，并且在哪个泄漏传感器或传感器检测到流体泄漏。
-
公开(公告)号：US20070006638A1
公开(公告)日：2007-01-11
申请号：US11382747
申请日：2006-05-11
申请人： Pyoung-Ho LIM , Jong-Kook SONG , Sung-Ho JO , Ki-Hwan PARK , Tae-Gun KIM , Woo-Koen KIM
发明人： Pyoung-Ho LIM , Jong-Kook SONG , Sung-Ho JO , Ki-Hwan PARK , Tae-Gun KIM , Woo-Koen KIM
IPC分类号： G01M3/04
摘要： A leak sensor and a leak sensing system are provided. The leak sensor preferably includes a fluid sensing member that is capable of sensing and indicating the presence of a fluid leaked from a fluid storage or transport member. The leak sensor further preferably includes at least two wires communicating with the fluid sensing member. The wires are preferably configured to be short-circuited when they contact the fluid leaked from the fluid storage or transport member. An electrical signal corresponding to a leak sensor location can thereby be sent to a control terminal of the leak sensing system. A portion of the wires may be arranged in a cable coated with a protective material such as Teflon. The control box (or terminal) preferably receives electrical signals from a plurality of leak sensors. The electrical signals can provide information on whether the fluid has leaked and on which leak sensor or sensors have detected the fluid leak.
摘要翻译： 提供了一种泄漏传感器和泄漏检测系统。 泄漏传感器优选地包括流体感测构件，其能够感测并指示从流体存储或运输构件泄漏的流体的存在。 泄漏传感器还优选地包括与流体感测构件连通的至少两根线。 电线优选构造成当它们接触从流体存储或运输构件泄漏的流体时短路。 因此，可以将与泄漏传感器位置对应的电信号发送到泄漏检测系统的控制端子。 电线的一部分可以布置在涂覆有诸如特氟纶之类的保护材料的电缆中。 控制箱（或端子）优选地从多个泄漏传感器接收电信号。 电信号可以提供关于流体是否泄漏的信息，并且在哪个泄漏传感器或传感器检测到流体泄漏。
-
公开(公告)号：US20070163627A1
公开(公告)日：2007-07-19
申请号：US11653262
申请日：2007-01-16
申请人： Pyoung-Ho Lim , Jong-Kook Song , Han-Mil Kim
发明人： Pyoung-Ho Lim , Jong-Kook Song , Han-Mil Kim
摘要： Provided are a nozzle and a related substrate treatment apparatus. The substrate treatment apparatus includes a process chamber, a supporting member disposed in the process chamber to support substrates, and a nozzle disposed in the process chamber to supply treatment fluid. The nozzle includes an outer tube along which a plurality of spraying holes are formed and which has a first end that is closed and an inner tube inserted into the outer tube through a hole formed on a second end of the outer tube.
摘要翻译： 提供喷嘴和相关的基底处理装置。 基板处理装置包括处理室，设置在处理室中以支撑基板的支撑构件以及设置在处理室中以供应处理流体的喷嘴。 喷嘴包括外管，多个喷孔形成在该外管上，该外管具有封闭的第一端和通过形成在外管的第二端上的孔插入外管的内管。
-
-
搜索结果
3 条记录 (耗时 0.011 秒)
