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公开(公告)号:US20060000986A1
公开(公告)日:2006-01-05
申请号:US10883871
申请日:2004-07-02
IPC分类号: H01J37/301
CPC分类号: G02F1/13378 , H01J37/317 , H01J2237/164
摘要: An apparatus (10, 10″) for producing an alignment surface on an associated substrate (12, 12″) of a liquid crystal display. An electron source (40) produces a collimated electron beam (50). A substrate support (20, 20″) supports the associated substrate (12, 12″) with a surface normal (80) of the substrate arranged at a preselected angle (α) relative to the collimated electron beam (50). The collimated electron beam (50) is rastered across the associated substrate (12, 12″) at the preselected angle (α) while the substrate moves through the electron beam.