公开(公告)号：US06490932B1

公开(公告)日：2002-12-10

申请号：US09341067

申请日：1999-07-02

申请人： Erwin Naegele ,  Martin Mast ,  Werner Fischer ,  Rainer Foerstner

发明人： Erwin Naegele ,  Martin Mast ,  Werner Fischer ,  Rainer Foerstner

IPC分类号： G01L708

CPC分类号： G01L9/0044

摘要： A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.

摘要翻译： 制造多个压力传感器的方法包括将多个支撑体接合到金属部件，金属部件形成隔膜，施加薄膜涂层以产生传感器元件，并且最后将设置有薄膜的金属部件 薄膜涂层和支撑体分成多个压力传感器，每个压力传感器具有单个支撑体中的一个，使得形成的压力传感器的数量对应于多个支撑体。