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    PRESSURE SENSOR DEVICE WITH A PROGRESSIVE STOPPER
    1.
    发明公开
    PRESSURE SENSOR DEVICE WITH A PROGRESSIVE STOPPER 审中-公开

    公开(公告)号：US20240230440A9

    公开(公告)日：2024-07-11

    申请号：US18049398

    申请日：2022-10-25

    Applicant: Vitesco Technologies USA, LLC

    Inventor： Jen-Huang Albert Chiou ,  Jeffrey Frye ,  Daniel J. Bratek

    IPC: G01L9/00

    CPC classification number: G01L9/0044 ,  G01L9/0051

    Abstract: A progressive stopper for a pressure sensing element is able to redistribute and reduce the stress of a diaphragm exposed to high pressure via multi-step contacts, such as at least dual contacts, where the diaphragm (designed for detecting pressure within a defined pressure range) is enabled to withstand much higher pressures above of the defined pressure range, such that the progressive stopper prevents catastrophic failure of the diaphragm. The progressive stopper is created to redistribute and reduce stress on the diaphragm significantly and effectively. The progressive stopper does not limit the output of the pressure sensing element such that the pressure sensing element is able to maintain the output voltage above the maximum output voltage of the defined pressure range when the diaphragm is exposed to high pressures with reduced stresses and strains.

    Pressure measuring cell
    4.
    发明授权
    Pressure measuring cell 有权

    公开(公告)号：US09759623B2

    公开(公告)日：2017-09-12

    申请号：US14647527

    申请日：2013-10-29

    Applicant: ENDRESS+HAUSER GMBH+CO. KG

    Inventor： Ulfert Drewes ,  Nils Ponath ,  Andreas Rossberg ,  Elke Schmidt

    IPC: G01L19/06 ,  G01L9/00

    CPC classification number: G01L19/06 ,  G01L9/0044 ,  G01L19/0618

    Abstract: A pressure measuring cell includes an elastic measuring membrane which is contactable with a first pressure on a first side and with a second pressure on a second side facing away from the first side. The measuring membrane is deflectable as a function of a difference between the first pressure and the second pressure, wherein the measuring membrane pressure-tightly isolates a first volume, which is facing the first side of the measuring membrane, from a second volume, which is facing the second side of the measuring membrane. The pressure measuring cell further includes a transducer for transducing the pressure dependent deflection of the measuring membrane into an electrical or optical signal. The measuring membrane has in the equilibrium state of the measuring membrane compressive stresses at least at the surface of the measuring membrane at least in a radial edge region, in which in the deflected state of the measuring membrane under pressure loading tensile stress maxima occur.

    PRESSURE SENSOR DEVICE WITH A MEMS PIEZORESISTIVE ELEMENT ATTACHED TO AN IN-CIRCUIT CERAMIC BOARD
    6.
    发明申请
    PRESSURE SENSOR DEVICE WITH A MEMS PIEZORESISTIVE ELEMENT ATTACHED TO AN IN-CIRCUIT CERAMIC BOARD 审中-公开
    具有连接到电路板陶瓷板的MEMS PIEZORESISTIVE元件的压力传感器装置

    公开(公告)号：US20160377496A1

    公开(公告)日：2016-12-29

    申请号：US15181975

    申请日：2016-06-14

    Applicant: Continental Automotive Systems, Inc.

    Inventor： Jen-Huang Albert Chiou ,  Benjamin C. Lin ,  Eric Matthew Vine

    IPC: G01L9/00 ,  G01B7/16

    CPC classification number: G01L9/008 ,  G01B7/16 ,  G01L9/0044 ,  G01L9/0055 ,  G01L19/0007 ,  G01L19/0076 ,  G01L19/04 ,  G01L19/148 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    Abstract: A pressure sensor device with a MEMS piezoresistive pressure sensing element attached to an in-circuit ceramic board comprises a monolithic ceramic circuit board formed by firing multiple layers of ceramic together. The bottom side of the circuit board has a cavity, which extends through layers of material from the ceramic circuit board is formed. A ceramic diaphragm, which is one of the layers, has a peripheral edge. The diaphragm's thickness enables the diaphragm bounded by the edge to deflect responsive to applied pressure. A MEMS piezoresistive pressure sensing element attached to the top side of the ceramic circuit board generates an output signal responsive to deflection of the ceramic diaphragm. A conduit carrying a pressurized fluid (liquid or gas) can be attached directly to the ceramic circuit board using a seal on the bottom of the ceramic circuit board, which surrounds the opening of the cavity through the bottom.

    Abstract translation: 具有附接到在线陶瓷板的MEMS压阻式压力感测元件的压力传感器装置包括通过将多层陶瓷烧结在一起形成的单片陶瓷电路板。 电路板的底部具有空腔，其形成有从陶瓷电路板形成的材料层。 作为层之一的陶瓷膜片具有周边边缘。 隔膜的厚度使得由边缘限定的隔膜响应于施加的压力而偏转。 附着在陶瓷电路板的顶侧的MEMS压阻式压力感测元件产生响应于陶瓷膜片偏转的输出信号。 携带加压流体（液体或气体）的导管可以使用陶瓷电路板的底部上的密封件直接附接到陶瓷电路板，陶瓷电路板通过底部包围空腔的开口。

    Pressure Sensor
    7.
    发明申请
    Pressure Sensor 审中-公开
    压力传感器

    公开(公告)号：US20160313199A1

    公开(公告)日：2016-10-27

    申请号：US15035838

    申请日：2014-11-12

    Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

    Inventor： Atsushi KAZAMA ,  Junji ONOZUKA ,  Hiroshi ONUKI ,  Miho TOBITA ,  Masayuki HIO

    IPC: G01L9/00

    CPC classification number: G01L9/0055 ,  G01L9/0044 ,  G01L19/0038 ,  G01L19/0084 ,  G01L19/04

    Abstract: In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed. The pressure sensor is a pressure sensor obtained by arranging, on a diaphragm having a long side and a short side, a sensor chip in which four strain gauges having the same characteristic and constituting a bridge circuit are provided, the pressure sensor being for detecting, in the bridge circuit, voltage output that is in proportion to a pressure applied to the diaphragm, and the pressure sensor is configured as follows: the four strain gauges are arranged to be adjacent to one another in the vicinity of the center of the diaphragm so that two strain gauges are arranged along the short side and the other two strain gauges are arranged along the long side; and the diaphragm has a thin portion in a long-side direction seen from the sensor chip.

    Abstract translation: 在具有应变仪设置在隔膜上的结构的压力传感器中，抑制了由应变计的位置偏移引起的传感器特性的变化，并且抑制了响应于温度变化的传感器输出的变化。 压力传感器是通过在具有长边和短边的隔膜上布置传感器芯片而获得的压力传感器，其中设置有具有相同特性并构成桥接电路的四个应变计，所述压力传感器用于检测， 在桥式电路中，与施加到隔膜的压力成比例的电压输出，并且压力传感器的构造如下：四个应变片布置成在隔膜中心附近彼此相邻， 两个应变计沿着短边排列，另外两个应变计沿长边排列; 并且隔膜在从传感器芯片观察的长边方向上具有薄的部分。

    Low Pressure Sensor and Flow Sensor
    10.
    发明申请
    Low Pressure Sensor and Flow Sensor 审中-公开
    低压传感器和流量传感器

    公开(公告)号：US20150276533A1

    公开(公告)日：2015-10-01

    申请号：US14719848

    申请日：2015-05-22

    Applicant: Amphenol Thermometrics, Inc.

    Inventor： Nickolai S. Belov ,  Lihua Li ,  Kim Vu ,  Dinh Vu

    IPC: G01L9/06 ,  G01R33/09 ,  G01R33/07

    CPC classification number: G01R33/09 ,  B81B3/001 ,  B81B3/0072 ,  B81B7/0061 ,  B81B2201/025 ,  G01L9/0042 ,  G01L9/0044 ,  G01L9/0047 ,  G01L19/0092 ,  G01L19/0618 ,  G01R33/07

    Abstract: A device/method for sensing a physical parameter, including a sensor die and a stress-sensitive circuit. The sensor die includes a semiconductor substrate and a cavity that creates an elastic element that bends in response to the physical parameter exerted on the sensor die. The elastic element includes at least at least one rigid island formed within the cavity, a thin area surrounding the at least one rigid island and having smaller thickness than the rigid island, and at least one stress concentrator at least partially formed in the thin area of the elastic element on the side of the substrate opposite the cavity. The stress-sensitive circuit includes at least one stress-sensitive component formed in the thin area of the elastic element. The at least one stress concentrator increases stress in the locations of the at least one stress-sensitive component resulting in an increase of the device sensitivity to the physical parameter.

    Abstract translation: 用于感测物理参数的装置/方法，包括传感器管芯和应力敏感电路。 传感器管芯包括半导体衬底和空腔，其产生响应于施加在传感器管芯上的物理参数而弯曲的弹性元件。 所述弹性元件包括形成在所述空腔内的至少一个刚性岛，围绕所述至少一个刚性岛的薄区域，并且具有比所述刚性岛更小的厚度，以及至少部分地形成在所述刚性岛的薄区域中的至少一个应力集中器 衬底侧的弹性元件与空腔相对。 应力敏感电路包括形成在弹性元件的薄区域中的至少一个应力敏感部件。 所述至少一个应力集中器增加所述至少一个应力敏感部件的位置中的应力，导致对所述物理参数的装置灵敏度的增加。

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