公开(公告)号：US06686995B2

公开(公告)日：2004-02-03

申请号：US10163762

申请日：2002-06-04

Applicant: Dieter E. Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie Michael Sullivan ,  Ralph Thomas Johnson

Inventor： Dieter E. Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie Michael Sullivan ,  Ralph Thomas Johnson

IPC: G01N2188

CPC classification number: G02B27/46 ,  G01N21/95623

Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

Abstract translation: 公开了一种用于选择性地过滤在光学系统内被检查的样品发出的光的空间部分的机构。 在一个实施例中，可编程空间滤波器（PSF）由与UV波长范围的一部分中的光兼容的材料构成。 在具体实施方案中，PSF由诸如聚合物稳定的液晶材料的UV相容材料构成。 在另一方面，PSF还包括由UV级玻璃形成的一对板。 PSF还可以包括相对薄的第一和第二ITO层，其导致约100和约300Ω/平方之间的薄层电阻。 PSF在两个方向提供选择性滤波。 换句话说，PSF提供二维滤波。