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公开(公告)号：US06205819B1
公开(公告)日：2001-03-27
申请号：US09546816
申请日：2000-04-11
IPC分类号： C03B2320
CPC分类号： C03B23/203 , Y02P40/57
摘要： An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.
摘要翻译： 改进的真空熔接结合结构和用于对准结合大面积玻璃板的方法，用微通道和进入孔和狭槽进行图案化，以提高玻璃熔融温度。 所有部件的真空泵送通过底部平台，其产生未触动的，无缺陷的顶部表面，其极大地改善通过该光滑表面的光学接近。 此外，具有对准和定位特征的完全非粘附的中间层（例如石墨）位于主钢平台和玻璃板对之间，这大大提高了质量，产量和易用性，并且使得能够对准 非常大的玻璃结构。
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公开(公告)号：US06082140A
公开(公告)日：2000-07-04
申请号：US334438
申请日：1999-06-16
IPC分类号： C03B23/203 , C03B23/20
CPC分类号： C03B23/203 , Y02P40/57 , Y10S425/06
摘要： An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all the components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.
摘要翻译： 改进的真空熔接结合结构和用于对准结合大面积玻璃板的方法，用微通道和进入孔和狭槽进行图案化，以提高玻璃熔融温度。 所有组件的真空泵送通过底部平台，其产生未触动的，无缺陷的顶部表面，其大大改善通过该光滑表面的光学接近。 此外，具有对准和定位特征的完全非粘附的中间层（例如石墨）位于主钢平台和玻璃板对之间，这大大提高了质量，产量和易用性，并且使得能够对准 非常大的玻璃结构。
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