公开(公告)号：US5054834A

公开(公告)日：1991-10-08

申请号：US446196

申请日：1989-12-05

申请人： Mauro Alessandri ,  Renzo Carrera ,  Giulio Iannuzzi

发明人： Mauro Alessandri ,  Renzo Carrera ,  Giulio Iannuzzi

IPC分类号： H01L21/687

CPC分类号： H01L21/68707 ,  Y10S294/907

摘要： A gripper for the advantageously robotized handling of one or more silicon wafers (5) comprises a part (2, 102) which allows the gripper (1, 101) to be secured to an operating arm or other handling member (3), the part (2, 102) being rigid with a support structure (4, 104) for the silicon wafers. The structure (4, 104) comprises at least two mutually cooperating opposing jaws (9, 10; 109, 110) mobile relative to each other; the jaws (9, 10; 109, 110) are provided with at least one seat (16, 116) for adapting to the shape of the lateral edge (17) of the wafer (5) supported by the jaws during its handling. Advantageously, on one side (108) of the wafer support structure (104) there are provided at least two members (174) mobile relative to the side (108) and arranged to cooperate with a silicon wafer holder or boat, to enable this latter to be supported and handled.

摘要翻译： 用于有利地自动化处理一个或多个硅晶片（5）的夹持器包括允许夹持器（1,101）固定到操作臂或其他处理构件（3）的部分（2,102），所述部件 （2,102）与用于硅晶片的支撑结构（4,104）是刚性的。 结构（4,104）包括相对于彼此移动的至少两个相互配合的相对的钳口（9,10; 109,110）; 钳口（9,10; 109,110）设置有至少一个座（16,116），用于在其处理期间适应由钳口支撑的晶片（5）的侧边缘（17）的形状。 有利地，在晶片支撑结构（104）的一侧（108）上设置有至少两个可相对于侧面（108）移动的构件（174），并被布置成与硅晶片保持器或舟皿配合，以使后者 得到支持和处理。