公开(公告)号：US20050173634A1

公开(公告)日：2005-08-11

申请号：US11071800

申请日：2005-03-02

申请人： Alan Wong ,  Gary Cao ,  Rex Eiserer

发明人： Alan Wong ,  Gary Cao ,  Rex Eiserer

IPC分类号： G02B27/46 ,  G01N23/00

CPC分类号： G02B27/46 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70683

摘要： An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.

摘要翻译： 提供光学测量目标并具有第一周期性结构和第二周期性结构。 第一周期结构具有至少两个特征和第一间距，并且第二周期结构具有至少两个特征和第二间距。 用光源照射光学测量目标，并且接收并分析来自光学计量学目标的光学信号。