公开(公告)号：US5264820A

公开(公告)日：1993-11-23

申请号：US860860

申请日：1992-03-31

申请人： John A. Kovacich ,  Christopher C. Hoinsky ,  Peter D. Van Vessem ,  Ricardo A. Rago

发明人： John A. Kovacich ,  Christopher C. Hoinsky ,  Peter D. Van Vessem ,  Ricardo A. Rago

IPC分类号： G01L9/00 ,  H01C10/10

CPC分类号： G01L19/147 ,  G01L19/0038 ,  G01L19/0645 ,  G01L9/0055

摘要： A pressure transducer for measuring high differential pressure media in a harsh environment where a diaphragm assembly is mounted to an intermediate support number which is mounted to a main support member where the high pressure media impinges on the diaphragm to create a force opposing that provided by the diaphragm support structure thereby loading the diaphragm in compression. The strain sensitive piezoresistive elements are protected and sealed from the low pressure media by a passivation layer and electrical signal leads are attached to bonding pads formed on the diaphragm assembly which are sealed to the intermediate support member by a sealing cap.

摘要翻译： 一种用于在恶劣环境中测量高压差介质的压力传感器，其中隔膜组件安装到中间支撑件号，所述中间支撑件安装到主支撑构件上，其中高压介质撞击隔膜以产生与由 隔膜支撑结构，从而将隔膜装载在压缩中。 应变敏感压阻元件通过钝化层被保护并与低压介质密封，并且电信号引线附接到通过密封盖密封到中间支撑构件的隔膜组件上形成的接合焊盘。