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公开(公告)号：US07162386B2
公开(公告)日：2007-01-09
申请号：US10133685
申请日：2002-04-25
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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公开(公告)号：US07165004B2
公开(公告)日：2007-01-16
申请号：US11342419
申请日：2006-01-30
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
摘要翻译： 装置，方法，系统和信号承载介质可以提供多个映射，其可以包括在运行时基于统计阈值或其他选择的标准来调用的多个探测序列。 每个地图可以包括晶片上的一系列位置，在每个位置执行的测试以及每个测试的测量结果。 参数测试系统可以在晶片上的相关位置执行测试。 如果超过统计阈值或满足所选择的标准，则可能会放弃当前地图，以利于不同的地图。
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公开(公告)号：US07139672B2
公开(公告)日：2006-11-21
申请号：US10924695
申请日：2004-08-24
IPC分类号： G01R31/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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公开(公告)号：US07383147B2
公开(公告)日：2008-06-03
申请号：US11342425
申请日：2006-01-30
IPC分类号： G06F19/00
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
摘要翻译： 装置，方法，系统和信号承载介质可以提供多个映射，其可以包括在运行时基于统计阈值或其他选择的标准来调用的多个探测序列。 每个地图可以包括晶片上的一系列位置，在每个位置执行的测试以及每个测试的测量结果。 参数测试系统可以在晶片上的相关位置执行测试。 如果超过统计阈值或满足所选择的标准，则可能会放弃当前地图，以利于不同的地图。
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公开(公告)号：US07337088B2
公开(公告)日：2008-02-26
申请号：US10131934
申请日：2002-04-25
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G01R1/025 , G01R31/2831
摘要： An intelligent measurement modular semiconductor parametric test system comprises an engine control module. The engine control module is operable to communicate with a user via a user interface, and is further operable to communicate with and to control the state of at least one other module in the semiconductor parametric test system including pluggable modules. The engine control module is further operable to control test flow via a test monitor module based on data and control events received from an intelligent measurement module. Other modules in various embodiments comprise prober monitor modules.
摘要翻译： 智能测量模块化半导体参数测试系统包括发动机控制模块。 发动机控制模块可操作以经由用户界面与用户通信，并且还可操作以与包括可插拔模块的半导体参数测试系统中的至少一个其他模块通信并控制其状态。 发动机控制模块还可操作以基于从智能测量模块接收的数据和控制事件，经由测试监视器模块来控制测试流程。 各种实施例中的其他模块包括探测器监视器模块。
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