公开(公告)号：US5039938A

公开(公告)日：1991-08-13

申请号：US541867

申请日：1990-06-21

申请人： Kirk Kohnen ,  Robert Prohaska

发明人： Kirk Kohnen ,  Robert Prohaska

IPC分类号： G01R31/28 ,  G01R31/306

CPC分类号： G01R31/306 ,  G01R31/281

摘要： An apparatus for testing hybrid substrates having a large number of networks and pads. The apparatus includes a DC power supply and a vacuum chamber. The vacuum chamber is equipped with a hot-filament electron source, and this electron source is electrically connected to the negative terminal of the DC power supply. The vacuum chamber is also equipped with a movable probe for making electrical connections from the positive terminal of the DC power supply to any one of the pads on the substrate. A small amount of phosphor of a type that glows when bombarded by electrons is placed on each pad of the substrate to be tested. The substrate is placed in the vacuum chamber for testing. The probe is brought into contact with one of the pads on the substrate, and a voltage in the order of 100 volts is applied between the electron source and the probe. Pads that are electrically connected to the probed pad act as anodes, thus attracting the electrons from the electron source, and are identified visually by the glow of the phosphor.

摘要翻译： 一种用于测试具有大量网络和焊盘的混合基板的装置。 该装置包括直流电源和真空室。 真空室配有热丝电子源，该电子源与直流电源的负极端子电连接。 真空室还配备有可移动探针，用于从DC电源的正极端子到基板上的任何一个焊盘进行电连接。 当被电子轰击时发光的少量磷光体被放置在待测试基板的每个焊盘上。 将基板放置在真空室中进行测试。 使探针与衬底上的一个焊盘接触，并且在电子源和探针之间施加大约100伏的电压。 电连接到探测垫的垫用作阳极，从而吸引来自电子源的电子，并通过荧光体的辉光在视觉上识别。