公开(公告)号：US20050224429A1

公开(公告)日：2005-10-13

申请号：US10952095

申请日：2004-09-28

申请人： Armin Maul ,  Roland Stock ,  Jurgen Weber ,  Thorsten Herbert

发明人： Armin Maul ,  Roland Stock ,  Jurgen Weber ,  Thorsten Herbert

IPC分类号： H01L21/673 ,  A47G19/08

CPC分类号： H01L21/67313

摘要： A support jig of quartz glass for receiving wafer-like substrates of semiconductor material in a vertical orientation comprises two spaced-apart circular end plates (10) which are interconnected by means of at least three transverse rods (1, 2, 3) extending in parallel with one another and between the end plates. They are provided with slots (4) for receiving the substrates, the slots (4) being open towards the substrate to be received and having a predetermined maximum slot depth, and they are arranged in a partial circle around the circular edge (5) of the end plates (10) such that an envelope (6) which encloses the partial circle on the outside projects nowhere beyond the circular edge (5). At least part of the transverse rods (1, 2, 3) have a radial cross-sectional profile which is configured as a circular form with a flattening (21, 31). The transverse rods (1, 2, 3) are arranged around the partial circle such that the flattening (21, 31) is oriented towards the circular edge of the end plates.

摘要翻译： 石英玻璃的支撑夹具用于接收垂直取向的半导体材料的晶片状基板包括两个间隔开的圆形端板（10），其通过至少三个横向杆（1,2,3）相互连接，所述横向杆（1,2,3） 彼此平行并且在端板之间。 它们设置有用于接收基板的槽（4），槽（4）朝向待接收的基板开口并且具有预定的最大槽深度，并且它们围绕圆周边缘（5）的部分圆周布置 端板（10）使得在外部包围部分圆圈的外壳（6）突出超过圆形边缘（5）。 至少一部分横杆（1,2,3）具有径向横截面轮廓，其被构造成具有平坦化（21,31）的圆形形状。 横向杆（1,2,3）围绕部分圆布置，使得扁平化（21,31）朝向端板的圆形边缘定向。